Mitsuhiro Tomura

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Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method of cleaning substrate processing apparatus
- Patent number 9,925,571
- Issue date Mar 27, 2018
- Tokyo Electron Limited
- Akihiro Kikuchi
- B08 - CLEANING
Information Patent Grant
Plasma etching method
- Patent number 9,570,312
- Issue date Feb 14, 2017
- Tokyo Electron Limited
- Ryohei Takeda
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA ETCHING METHOD
- Publication number 20150099366
- Publication date Apr 9, 2015
- TOKYO ELECTRON LIMITED
- Ryohei Takeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20150007857
- Publication date Jan 8, 2015
- TOKYO ELECTRON LIMITED
- Akihiro Kikuchi
- B08 - CLEANING