Mitsuhiro Yuasa

Person

Tokyo-To, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Process monitoring apparatus and method for monitoring process
- Patent number 8,010,228
- Issue date Aug 30, 2011
- Tokyo Electron Limited
- Mitsuhiro Yuasa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process monitor and system for producing semiconductor
- Patent number 7,303,928
- Issue date Dec 4, 2007
- Tokyo Electron Limited
- Mitsuhiro Yuasa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer supporter
- Patent number 7,237,606
- Issue date Jul 3, 2007
- Tokyo Electron Limited
- Mitsuhiro Yuasa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Drop detection device or abnormality detection device and portable...
- Patent number 7,180,425
- Issue date Feb 20, 2007
- Tokyo Electron Limited
- Mitsuhiro Yuasa
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Matching unit and plasma processing system
- Patent number 7,112,926
- Issue date Sep 26, 2006
- Tokyo Electron Limited
- Shinji Himori
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate processing device and processing method
- Patent number 7,101,797
- Issue date Sep 5, 2006
- Tokyo Electron Limited
- Mitsuhiro Yuasa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor fabricating apparatus
- Patent number 7,072,798
- Issue date Jul 4, 2006
- Tokyo Electron Limited
- Mitsuhiro Yuasa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing mask for electron beam lithography and mask...
- Patent number 7,029,801
- Issue date Apr 18, 2006
- Tokyo Electron Limited
- Mitsuhiro Yuasa
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Plasma processing apparatus
- Patent number 6,737,812
- Issue date May 18, 2004
- Tokyo Electron Limited
- Mitsuhiro Yuasa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor manufacturing apparatus
- Patent number 6,470,824
- Issue date Oct 29, 2002
- Tokyo Electron Limited
- Satoru Kawakami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor manufacturing method and semiconductor manufacturing...
- Patent number 6,399,520
- Issue date Jun 4, 2002
- Tokyo Electron Limited
- Satoru Kawakami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microwave plasma processing apparatus having a vacuum pump located...
- Patent number 6,358,324
- Issue date Mar 19, 2002
- Tokyo Electron Limited
- Toshiaki Hongoh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
PROCESS MONITOR AND SEMICONDUCTOR MANUFACTURING APPARATUS
- Publication number 20110298465
- Publication date Dec 8, 2011
- TOKYO ELECTRON LIMITED
- Mitsuhiro Yuasa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Process monitoring apparatus and method for monitoring process
- Publication number 20070254384
- Publication date Nov 1, 2007
- TOKYO ELECTRON LIMITED
- Mitsuhiro Yuasa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma processing apparatus and plasma processing method
- Publication number 20060234512
- Publication date Oct 19, 2006
- TOKYO ELECTRON LIMITED
- Mitsuhiro Yuasa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Process monitor and system for producing semiconductor
- Publication number 20060008951
- Publication date Jan 12, 2006
- Mitsuhiro Yuasa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Drop detection device or abnormality detection device and portable...
- Publication number 20050279165
- Publication date Dec 22, 2005
- TOKYO ELECTRON LIMITED
- Mitsuhiro Yuasa
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
Bonding method, bonding apparatus and sealing means
- Publication number 20050260828
- Publication date Nov 24, 2005
- TOKYO ELECTRON LIMITED
- Mitsuhiro Yuasa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for manufacturing nonradiative dielectric waveguide and nonr...
- Publication number 20050251994
- Publication date Nov 17, 2005
- Mitsuhiro Yuasa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for carrying substrate
- Publication number 20050163598
- Publication date Jul 28, 2005
- Tokyou Electron Limited
- Mitsuhiro Yuasa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Mems array, manufacturing method thereof, and mems device manufactu...
- Publication number 20050156259
- Publication date Jul 21, 2005
- Mitsuhiro Yuasa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Solar cell array
- Publication number 20050087223
- Publication date Apr 28, 2005
- TOKYO ELECTRON LIMITED
- Mitsuhiro Yuasa
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
Semiconductor fabricating apparatus
- Publication number 20040214435
- Publication date Oct 28, 2004
- Mitsuhiro Yuasa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wafer supporter
- Publication number 20040188020
- Publication date Sep 30, 2004
- Mitsuhiro Yuasa
- C30 - CRYSTAL GROWTH
Information Patent Application
Feed-through manufacturing method and feed-through
- Publication number 20040171268
- Publication date Sep 2, 2004
- Mitsuhiro Yuasa
- G01 - MEASURING TESTING
Information Patent Application
Substrate processing device and processing method
- Publication number 20040040655
- Publication date Mar 4, 2004
- TOKYO ELECTRON LIMITED
- Mitsuhiro Yuasa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of forming via metal layers and via metal layer-formed subst...
- Publication number 20030178389
- Publication date Sep 25, 2003
- Mitsuhiro Yuasa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma processing apparatus and plasma processing method
- Publication number 20030176069
- Publication date Sep 18, 2003
- TOKYO ELECTRON LIMITED
- Mitsuhiro Yuasa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of manufacturing mask for electron beam lithography and mask...
- Publication number 20030104287
- Publication date Jun 5, 2003
- TOKYO ELECTRON LIMITED
- Mitsuhiro Yuasa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Plasma processing apparatus
- Publication number 20030057848
- Publication date Mar 27, 2003
- Mitsuhiro Yuasa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Matching unit and plasma processing system
- Publication number 20020134508
- Publication date Sep 26, 2002
- Shinji Himori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor manufacturing apparatus
- Publication number 20020111000
- Publication date Aug 15, 2002
- Satoru Kawakami
- H01 - BASIC ELECTRIC ELEMENTS

Mitsuhiro Yuasa

Person

Patents Grantslast 30 patents

Process monitoring apparatus and method for monitoring process

Process monitor and system for producing semiconductor

Wafer supporter

Drop detection device or abnormality detection device and portable...

Matching unit and plasma processing system

Substrate processing device and processing method

Semiconductor fabricating apparatus

Method of manufacturing mask for electron beam lithography and mask...

Plasma processing apparatus

Semiconductor manufacturing apparatus

Semiconductor manufacturing method and semiconductor manufacturing...

Microwave plasma processing apparatus having a vacuum pump located...

Patents Applicationslast 30 patents

PROCESS MONITOR AND SEMICONDUCTOR MANUFACTURING APPARATUS

Process monitoring apparatus and method for monitoring process

Plasma processing apparatus and plasma processing method

Process monitor and system for producing semiconductor

Drop detection device or abnormality detection device and portable...

Bonding method, bonding apparatus and sealing means

Method for manufacturing nonradiative dielectric waveguide and nonr...

Method for carrying substrate

Mems array, manufacturing method thereof, and mems device manufactu...

Solar cell array

Semiconductor fabricating apparatus

Wafer supporter

Feed-through manufacturing method and feed-through

Substrate processing device and processing method

Method of forming via metal layers and via metal layer-formed subst...

Plasma processing apparatus and plasma processing method

Method of manufacturing mask for electron beam lithography and mask...

Plasma processing apparatus

Matching unit and plasma processing system

Semiconductor manufacturing apparatus