Mitsuji Marumo

Person

Utsunomiya-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Processing apparatus and device manufacturing method
- Patent number 9,123,760
- Issue date Sep 1, 2015
- Canon Kabushiki Kaisha
- Shinichi Hirano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Processing apparatus and device manufacturing method
- Patent number 8,441,614
- Issue date May 14, 2013
- Canon Kabushiki Kaisha
- Shinichi Hirano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Semiconductor manufacturing method and apparatus
- Patent number 6,800,803
- Issue date Oct 5, 2004
- Canon Kabushiki Kaisha
- Mitsuji Marumo
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate holding device and exposing apparatus using the same
- Patent number 5,999,589
- Issue date Dec 7, 1999
- Canon Kabushiki Kaisha
- Yuji Chiba
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate holding device and exposing apparatus using the same
- Patent number 5,883,932
- Issue date Mar 16, 1999
- Canon Kabushiki Kaisha
- Yuji Chiba
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate conveying system
- Patent number 5,640,440
- Issue date Jun 17, 1997
- Canon Kabushiki Kaisha
- Mitsutoshi Kuno
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate holding system and exposure apparatus having the same
- Patent number 5,586,159
- Issue date Dec 17, 1996
- Canon Kabushiki Kaisha
- Atsushi Kitaoka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate holding apparatus and a system using the same
- Patent number 5,436,693
- Issue date Jul 25, 1995
- Canon Kabushiki Kaisha
- Mitsuji Marumo
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Vacuum chuck
- Patent number 5,374,829
- Issue date Dec 20, 1994
- Canon Kabushiki Kaisha
- Eiji Sakamoto
- C30 - CRYSTAL GROWTH
Information Patent Grant
Wafer table and exposure apparatus with the same
- Patent number 5,231,291
- Issue date Jul 27, 1993
- Canon Kabushiki Kaisha
- Mitsuaki Amemiya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Vacuum attraction type substrate holding device
- Patent number 5,203,547
- Issue date Apr 20, 1993
- Canon Kabushiki Kaisha
- Mitsuji Marumo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum chuck
- Patent number 5,191,218
- Issue date Mar 2, 1993
- Canon Kabushiki Kaisha
- Tetsuzo Mori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate holding device
- Patent number 5,160,961
- Issue date Nov 3, 1992
- Canon Kabushiki Kaisha
- Mitsuji Marumo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
PROCESSING APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20130230371
- Publication date Sep 5, 2013
- Canon Kabushiki Kaisha
- Shinichi Hirano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20100026980
- Publication date Feb 4, 2010
- Canon Kabushiki Kaisha
- Shinichi Hirano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MINI-ENVIRONMENT POD DEVICE, AN EXPOSURE APPARATUS AND A DEVICE MAN...
- Publication number 20070175838
- Publication date Aug 2, 2007
- Canon Kabushiki Kaisha
- Mitsuji MARUMO
- H01 - BASIC ELECTRIC ELEMENTS

Mitsuji Marumo

Person

Patents Grantslast 30 patents

Processing apparatus and device manufacturing method

Processing apparatus and device manufacturing method

Semiconductor manufacturing method and apparatus

Substrate holding device and exposing apparatus using the same

Substrate holding device and exposing apparatus using the same

Substrate conveying system

Substrate holding system and exposure apparatus having the same

Substrate holding apparatus and a system using the same

Vacuum chuck

Wafer table and exposure apparatus with the same

Vacuum attraction type substrate holding device

Vacuum chuck

Substrate holding device

Patents Applicationslast 30 patents

PROCESSING APPARATUS AND DEVICE MANUFACTURING METHOD

PROCESSING APPARATUS AND DEVICE MANUFACTURING METHOD

MINI-ENVIRONMENT POD DEVICE, AN EXPOSURE APPARATUS AND A DEVICE MAN...