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Kawasaki, JP
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last 30 patents
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Patent Grant
Patterned mask having a transparent etching stopper layer
Patent number
5,876,877
Issue date
Mar 2, 1999
Fujitsu Limited
Isamu Hanyu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Projection exposure method and an optical mask for use in projectio...
Patent number
5,418,093
Issue date
May 23, 1995
Fujitsu Limited
Satoru Asai
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY