Mitsukazu Takahashi

Person

Kyoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate treating apparatus and substrate treating method
- Patent number 12,080,566
- Issue date Sep 3, 2024
- SCREEN Holdings Co., Ltd.
- Taiki Hinode
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing apparatus, substrate processing system, and su...
- Patent number 10,964,556
- Issue date Mar 30, 2021
- SCREEN Holdings Co., Ltd.
- Ryo Muramoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate container, load port apparatus, and substrate treating ap...
- Patent number 10,910,247
- Issue date Feb 2, 2021
- SCREEN Holdings Co., Ltd.
- Kazuhiro Honsho
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Substrate container, load port apparatus, and substrate treating ap...
- Patent number 10,381,249
- Issue date Aug 13, 2019
- SCREEN Holdings Co., Ltd.
- Kazuhiro Honsho
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Substrate processing device and substrate processing method
- Patent number 9,601,357
- Issue date Mar 21, 2017
- SCREEN Holdings Co., Ltd.
- Koji Hashimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate container, a load port apparatus, and a substrate treatin...
- Patent number 9,576,831
- Issue date Feb 21, 2017
- SCREEN Holdings Co., Ltd.
- Akito Hatano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method for...
- Patent number 9,327,918
- Issue date May 3, 2016
- SCREEN Holdings Co., Ltd.
- Motoyasu Hayashi
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Thermal processing apparatus and thermal processing method
- Patent number 7,371,997
- Issue date May 13, 2008
- Dainippon Screen Mfg. Co., Ltd.
- Toshiyuki Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal processing apparatus and thermal processing method
- Patent number 7,038,173
- Issue date May 2, 2006
- Dainippon Screen Mfg. Co., Ltd.
- Mitsukazu Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal processing apparatus
- Patent number 6,868,302
- Issue date Mar 15, 2005
- Dainippon Screen Mfg. Co., Ltd.
- Toshiyuki Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat treatment apparatus
- Patent number 6,518,547
- Issue date Feb 11, 2003
- Dainippon Screen Mfg. Co., Ltd.
- Mitsukazu Takahashi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus for measuring the temperature of a substrate
- Patent number 5,539,855
- Issue date Jul 23, 1996
- Dainippon Screen Mfg. Co., Ltd.
- Mitsukazu Takahashi
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus for heat-treating wafer by light-irradiation and device f...
- Patent number 5,315,092
- Issue date May 24, 1994
- Dainippon Screen Mfg. Co., Ltd.
- Mitsukazu Takahashi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD
- Publication number 20220344176
- Publication date Oct 27, 2022
- SCREEN Holdings Co., Ltd.
- Taiki HINODE
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND SU...
- Publication number 20180261475
- Publication date Sep 13, 2018
- SCREEN Holdings Co., Ltd.
- Ryo MURAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CONTAINER, LOAD PORT APPARATUS, AND SUBSTRATE TREATING AP...
- Publication number 20170294328
- Publication date Oct 12, 2017
- SCREEN Holdings Co., Ltd.
- Kazuhiro HONSHO
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
SUBSTRATE CONTAINER, LOAD PORT APPARATUS, AND SUBSTRATE TREATING AP...
- Publication number 20170263479
- Publication date Sep 14, 2017
- SCREEN Holdings Co., Ltd.
- Kazuhiro HONSHO
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND SU...
- Publication number 20160240401
- Publication date Aug 18, 2016
- SCREEN Holdings Co., Ltd.
- Ryo MURAMOTO
- B08 - CLEANING
Information Patent Application
SUBSTRATE CONTAINER, A LOAD PORT APPARATUS, AND A SUBSTRATE TREATIN...
- Publication number 20160071753
- Publication date Mar 10, 2016
- SCREEN Holdings Co., Ltd.
- Akito HATANO
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD
- Publication number 20150090694
- Publication date Apr 2, 2015
- Koji Hashimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD FOR...
- Publication number 20140093337
- Publication date Apr 3, 2014
- Dainippon Screen Mfg. Co., Ltd.
- Motoyasu HAYASHI
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
Thermal processing apparatus and thermal processing method
- Publication number 20050149222
- Publication date Jul 7, 2005
- Dainippon Screen Mfg. Co., Ltd.
- Toshiyuki Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Thermal processing apparatus and thermal processing method
- Publication number 20030186563
- Publication date Oct 2, 2003
- Dainippon Screen Mfg. Co., Ltd.
- Toshiyuki Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Thermal processing apparatus and thermal processing method
- Publication number 20030146200
- Publication date Aug 7, 2003
- Dainippon Screen Mfg. Co., Ltd.
- Mitsukazu Takahashi
- C30 - CRYSTAL GROWTH
Information Patent Application
Heat treatment apparatus
- Publication number 20010027969
- Publication date Oct 11, 2001
- Dainippon Screen Mfg. Co., Ltd.
- Mitsukazu Takahashi
- H01 - BASIC ELECTRIC ELEMENTS

Mitsukazu Takahashi

Person

Patents Grantslast 30 patents

Substrate treating apparatus and substrate treating method

Substrate processing apparatus, substrate processing system, and su...

Substrate container, load port apparatus, and substrate treating ap...

Substrate container, load port apparatus, and substrate treating ap...

Substrate processing device and substrate processing method

Substrate container, a load port apparatus, and a substrate treatin...

Substrate processing apparatus and substrate processing method for...

Thermal processing apparatus and thermal processing method

Thermal processing apparatus and thermal processing method

Thermal processing apparatus

Heat treatment apparatus

Apparatus for measuring the temperature of a substrate

Apparatus for heat-treating wafer by light-irradiation and device f...

Patents Applicationslast 30 patents

SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND SU...

SUBSTRATE CONTAINER, LOAD PORT APPARATUS, AND SUBSTRATE TREATING AP...

SUBSTRATE CONTAINER, LOAD PORT APPARATUS, AND SUBSTRATE TREATING AP...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND SU...

SUBSTRATE CONTAINER, A LOAD PORT APPARATUS, AND A SUBSTRATE TREATIN...

SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD FOR...

Thermal processing apparatus and thermal processing method

Thermal processing apparatus and thermal processing method

Thermal processing apparatus and thermal processing method

Heat treatment apparatus