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Mitsumasa Kodama
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Kyoto, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate treating method and apparatus
Patent number
7,105,074
Issue date
Sep 12, 2006
Dainippon Screen Mfg. Co., Ltd.
Osamu Tamada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate treating apparatus and method
Patent number
6,832,863
Issue date
Dec 21, 2004
Dainippon Screen Mfg. Co., Ltd.
Kenji Sugimoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus
Patent number
6,558,053
Issue date
May 6, 2003
Dainippon Screen Mfg. Co., Ltd.
Kazuhito Shigemori
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Processing apparatus having parts for thermal and non-thermal treat...
Patent number
5,639,301
Issue date
Jun 17, 1997
Dainippon Screen Mfg. Co., Ltd.
Shigeru Sasada
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Substrate treating apparatus and method
Publication number
20040005149
Publication date
Jan 8, 2004
Dainippon Screen Mfg. Co.,Ltd.
Kenji Sugimoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Substrate treating method and apparatus
Publication number
20030017665
Publication date
Jan 23, 2003
Dainippon Screen Mfg. Co., Ltd.
Osamu Tamada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate processing apparatus
Publication number
20020152958
Publication date
Oct 24, 2002
Dainippon Screen Mfg. Co., Ltd.
Kazuhito Shigemori
H01 - BASIC ELECTRIC ELEMENTS