Mitsumasa Koyanagi

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Kokubunji, JA

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Patents Grantslast 30 patents

Information Patent Grant
Method for fabricating a silicon device utilizing ion-implantation...
- Patent number 4,016,007
- Issue date Apr 5, 1977
- Hitachi, Ltd.
- Yasuo Wada
- H01 - BASIC ELECTRIC ELEMENTS