TREA

Mitsunao Shibasaki

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  • Ebina, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Apparatus and method for processing substrate
    • Patent number 6,387,182
    • Issue date May 14, 2002
    • Ebara Corporation
    • Kuniaki Horie
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Thin-film deposition apparatus
    • Patent number 6,176,929
    • Issue date Jan 23, 2001
    • Ebara Corporation
    • Yukio Fukunaga
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Vapor feed supply system
    • Patent number 5,950,646
    • Issue date Sep 14, 1999
    • Ebara Corporation
    • Kuniaki Horie
    • B08 - CLEANING
  • Information Patent Grant

    Spraying device
    • Patent number 5,904,301
    • Issue date May 18, 1999
    • Ebara Corporation
    • Masaaki Kajiyama
    • B08 - CLEANING
  • Information Patent Grant

    Spin dryer apparatus
    • Patent number 5,829,156
    • Issue date Nov 3, 1998
    • Ebara Corporation
    • Mitsunao Shibasaki
    • F26 - DRYING