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Katano, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Method for fabricating a semi-conductor device having a tungsten fi...
Patent number
6,746,962
Issue date
Jun 8, 2004
Matsushita Electric Industrial Co., Ltd.
Takenobu Kishida
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for forming buried interconnect
Patent number
6,737,348
Issue date
May 18, 2004
Matsushita Electric Industrial Co., Ltd.
Mitsunari Satake
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for holding substrate to be polished
Patent number
6,074,289
Issue date
Jun 13, 2000
Matsushita Electric Industrial Co., Ltd.
Tomoyasu Murakami
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing method and polishing apparatus
Patent number
6,012,967
Issue date
Jan 11, 2000
Matsushita Electric Industrial Co., Ltd.
Mitsunari Satake
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
Information
Patent Application
Polishing pad, polishing apparatus and method for polishing wafer
Publication number
20070161342
Publication date
Jul 12, 2007
Matsushita Electric Industrial Co., Ltd.
Eigo Shirakashi
B24 - GRINDING POLISHING
Information
Patent Application
Polishing pad, polishing apparatus and method for polishing wafer
Publication number
20040266322
Publication date
Dec 30, 2004
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
Eigo Shirakashi
B24 - GRINDING POLISHING
Information
Patent Application
Method for forming buried wiring and semiconductor device
Publication number
20040248401
Publication date
Dec 9, 2004
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
Mitsunari Satake
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
Method for forming buried interconnect
Publication number
20020168846
Publication date
Nov 14, 2002
Mitsunari Satake
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor device and method for fabricating the same
Publication number
20020050648
Publication date
May 2, 2002
Takenobu Kishida
H01 - BASIC ELECTRIC ELEMENTS