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Mitsunobu Isobe
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Machida, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Method and its apparatus for inspecting a pattern
Patent number
7,269,280
Issue date
Sep 11, 2007
Hitachi, Ltd.
Takashi Hiroi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Apparatus for inspecting a specimen
Patent number
7,049,587
Issue date
May 23, 2006
Hitachi, Ltd.
Takashi Hiroi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Inspection system for circuit patterns and a method thereof
Patent number
6,831,998
Issue date
Dec 14, 2004
Hitachi, Ltd.
Hiroya Koshishiba
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Microscopic defect inspection apparatus and method thereof, as well...
Patent number
6,566,671
Issue date
May 20, 2003
Hitachi, Ltd.
Atsushi Yoshida
G01 - MEASURING TESTING
Information
Patent Grant
Method and apparatus for pattern detection
Patent number
5,430,548
Issue date
Jul 4, 1995
Hitachi, Ltd.
Takashi Hiroi
G01 - MEASURING TESTING
Information
Patent Grant
Character recognition equipment
Patent number
5,144,683
Issue date
Sep 1, 1992
Hitachi, Ltd.
Hideaki Suzuki
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Object recognize apparatus
Patent number
5,018,219
Issue date
May 21, 1991
Hitachi, Ltd.
Kichie Matsuzaki
G06 - COMPUTING CALCULATING COUNTING
Patents Applications
last 30 patents
Information
Patent Application
METHOD AND ITS APPARATUS FOR INSPECTING A PATTERN
Publication number
20080002876
Publication date
Jan 3, 2008
Takashi Hiroi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Pattern inspection method and system therefor
Publication number
20070131877
Publication date
Jun 14, 2007
Takashi Hiroi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Pattern inspection method and system therefor
Publication number
20030062487
Publication date
Apr 3, 2003
Takashi Hiroi
G01 - MEASURING TESTING
Information
Patent Application
Apparatus for inspecting a specimen
Publication number
20030063792
Publication date
Apr 3, 2003
Takashi Hiroi
G01 - MEASURING TESTING
Information
Patent Application
Method and its apparatus for inspecting a pattern
Publication number
20030007677
Publication date
Jan 9, 2003
Takashi Hiroi
G06 - COMPUTING CALCULATING COUNTING