Mitsunori Nakamori

Person

Kumamoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,938,524
- Issue date Mar 26, 2024
- Tokyo Electron Limited
- Jun Nonaka
- B08 - CLEANING
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,935,736
- Issue date Mar 19, 2024
- Tokyo Electron Limited
- Rintaro Higuchi
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus and method of processing substrate
- Patent number 11,723,259
- Issue date Aug 8, 2023
- Tokyo Electron Limited
- Koukichi Hiroshiro
Information Patent Grant
Liquid processing method, substrate processing apparatus, and stora...
- Patent number 10,867,814
- Issue date Dec 15, 2020
- Tokyo Electron Limited
- Yosuke Kawabuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid processing method, substrate processing apparatus and record...
- Patent number 10,727,042
- Issue date Jul 28, 2020
- Tokyo Electron Limited
- Mitsunori Nakamori
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 10,366,877
- Issue date Jul 30, 2019
- Tokyo Electron Limited
- Keisuke Egashira
- B08 - CLEANING
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 10,325,771
- Issue date Jun 18, 2019
- Tokyo Electron Limited
- Keisuke Egashira
- B08 - CLEANING
Information Patent Grant
Substrate liquid processing apparatus, substrate liquid processing...
- Patent number 10,026,629
- Issue date Jul 17, 2018
- Tokyo Electron Limited
- Mitsunori Nakamori
- B08 - CLEANING
Information Patent Grant
Substrate processing method and substrate processing system
- Patent number 9,953,840
- Issue date Apr 24, 2018
- Tokyo Electron Limited
- Hiroshi Marumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for polishing rear surface of substrate, system for polis...
- Patent number 9,095,953
- Issue date Aug 4, 2015
- Tokyo Electron Limited
- Mitsunori Nakamori
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 8,978,671
- Issue date Mar 17, 2015
- Tokyo Electron Limited
- Satoru Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid processing apparatus, liquid processing method, and storage...
- Patent number 8,617,656
- Issue date Dec 31, 2013
- Tokyo Electron Limited
- Mitsunori Nakamori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method, substrate processing apparatus, and st...
- Patent number 8,043,469
- Issue date Oct 25, 2011
- Tokyo Electron Limited
- Mitsunori Nakamori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid processing method and liquid processing apparatus
- Patent number 7,914,626
- Issue date Mar 29, 2011
- Tokyo Electron Limited
- Noritaka Uchida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ozone processing apparatus and ozone processing method
- Patent number 7,767,006
- Issue date Aug 3, 2010
- Tokyo Electron Limited
- Yoshichika Tokuno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method, substrate processing apparatus and com...
- Patent number 7,731,799
- Issue date Jun 8, 2010
- Tokyo Electron Limited
- Takayuki Toshima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Computer readable storage medium for controlling substrate processi...
- Patent number 7,693,597
- Issue date Apr 6, 2010
- Tokyo Electron Limited
- Mitsunori Nakamori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 6,979,655
- Issue date Dec 27, 2005
- Tokyo Electron Limited
- Takayuki Niuya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning processing method and cleaning processing apparatus
- Patent number 6,863,741
- Issue date Mar 8, 2005
- Tokyo Electron Limited
- Takehiko Orii
- B08 - CLEANING
Information Patent Grant
Device for processing substrate
- Patent number 6,589,338
- Issue date Jul 8, 2003
- Tokyo Electron Limited
- Mitsunori Nakamori
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD
- Publication number 20240307821
- Publication date Sep 19, 2024
- TOKYO ELECTRON LIMITED
- Yosuke HACHIYA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240128307
- Publication date Apr 18, 2024
- TOKYO ELECTRON LIMITED
- Rintaro HIGUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUPPLY SYSTEM, SUBSTRATE PROCESSING...
- Publication number 20240047234
- Publication date Feb 8, 2024
- TOKYO ELECTRON LIMITED
- Yosuke HACHIYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20220168785
- Publication date Jun 2, 2022
- TOKYO ELECTRON LIMITED
- Jun NONAKA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF PROCESSING SUBSTRATE
- Publication number 20210391539
- Publication date Dec 16, 2021
- TOKYO ELECTRON LIMITED
- Koukichi HIROSHIRO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20210313171
- Publication date Oct 7, 2021
- TOKYO ELECTRON LIMITED
- Rintaro HIGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20190228963
- Publication date Jul 25, 2019
- TOKYO ELECTRON LIMITED
- Mitsunori Nakamori
- B08 - CLEANING
Information Patent Application
LIQUID PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS AND RECORD...
- Publication number 20180040471
- Publication date Feb 8, 2018
- TOKYO ELECTRON LIMITED
- Mitsunori Nakamori
- B08 - CLEANING
Information Patent Application
SUBSTRATE LIQUID PROCESSING METHOD, SUBSTRATE LIQUID PROCESSING APP...
- Publication number 20170316961
- Publication date Nov 2, 2017
- TOKYO ELECTRON LIMITED
- Mitsunori Nakamori
- B08 - CLEANING
Information Patent Application
SUBSTRATE LIQUID PROCESSING METHOD, SUBSTRATE LIQUID PROCESSING APP...
- Publication number 20170301534
- Publication date Oct 19, 2017
- TOKYO ELECTRON LIMITED
- Mitsunori Nakamori
- B08 - CLEANING
Information Patent Application
LIQUID PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND STORA...
- Publication number 20170236729
- Publication date Aug 17, 2017
- TOKYO ELECTRON LIMITED
- Yosuke Kawabuchi
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20170186620
- Publication date Jun 29, 2017
- TOKYO ELECTRON LIMITED
- Hiroshi Marumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20170103881
- Publication date Apr 13, 2017
- TOKYO ELECTRON LIMITED
- Keisuke Egashira
- B08 - CLEANING
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING...
- Publication number 20160111303
- Publication date Apr 21, 2016
- TOKYO ELECTRON LIMITED
- Mitsunori Nakamori
- B08 - CLEANING
Information Patent Application
LIQUID PROCESSING METHOD, LIQUID PROCESSING APPARATUS AND STORAGE M...
- Publication number 20140377463
- Publication date Dec 25, 2014
- Yosuke Hachiya
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
Substrate Liquid Processing Apparatus, Substrate Liquid Processing...
- Publication number 20120164339
- Publication date Jun 28, 2012
- TOKYO ELECTRON LIMITED
- Mitsunori NAKAMORI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing Method and Substrate Processing Apparatus
- Publication number 20120164840
- Publication date Jun 28, 2012
- Satoru Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus for Polishing Rear Surface of Substrate, System for Polis...
- Publication number 20110312247
- Publication date Dec 22, 2011
- TOKYO ELECTRON LIMITED
- Mitsunori Nakamori
- B24 - GRINDING POLISHING
Information Patent Application
LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD, AND STORAGE...
- Publication number 20100330283
- Publication date Dec 30, 2010
- TOKYO ELECTRON LIMITED
- Mitsunori NAKAMORI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POLYSILICON LAYER REMOVING METHOD AND STORAGE MEDIUM
- Publication number 20090191716
- Publication date Jul 30, 2009
- TOKYO ELECTRON LIMITED
- Mitsunori Nakamori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing method, substrate processing apparatus, and st...
- Publication number 20080093340
- Publication date Apr 24, 2008
- Mitsunori Nakamori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Liquid processing method and liquid processing apparatus
- Publication number 20070113872
- Publication date May 24, 2007
- TOKYO ELECTRON LIMITED
- Noritaka Uchida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ozone processing apparatus and ozone processing method
- Publication number 20070107751
- Publication date May 17, 2007
- TOKYO ELECTRON LIMITED
- Yoshichika Tokuno
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
Substrate processing method, substrate processing apparatus and com...
- Publication number 20070074747
- Publication date Apr 5, 2007
- Takayuki Toshima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate processing method and substrate processing apparatus
- Publication number 20060163205
- Publication date Jul 27, 2006
- Takayuki Niuya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate processing method and substrate processing apparatus
- Publication number 20060079096
- Publication date Apr 13, 2006
- TOKYO ELECTRON LIMITED
- Mitsunori Nakamori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate processing method and substrate processing apparatus
- Publication number 20030119318
- Publication date Jun 26, 2003
- Takayuki Niuya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Cleaning processing method and cleaning processing apparatus
- Publication number 20020007844
- Publication date Jan 24, 2002
- Takehiko Orii
- H01 - BASIC ELECTRIC ELEMENTS

Mitsunori Nakamori

Person

Patents Grantslast 30 patents

Substrate processing apparatus and substrate processing method

Substrate processing method and substrate processing apparatus

Substrate processing apparatus and method of processing substrate

Liquid processing method, substrate processing apparatus, and stora...

Liquid processing method, substrate processing apparatus and record...

Substrate processing method and substrate processing apparatus

Substrate processing method and substrate processing apparatus

Substrate liquid processing apparatus, substrate liquid processing...

Substrate processing method and substrate processing system

Apparatus for polishing rear surface of substrate, system for polis...

Substrate processing method and substrate processing apparatus

Liquid processing apparatus, liquid processing method, and storage...

Substrate processing method, substrate processing apparatus, and st...

Liquid processing method and liquid processing apparatus

Ozone processing apparatus and ozone processing method

Substrate processing method, substrate processing apparatus and com...

Computer readable storage medium for controlling substrate processi...

Substrate processing method and substrate processing apparatus

Cleaning processing method and cleaning processing apparatus

Device for processing substrate

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS, SUPPLY SYSTEM, SUBSTRATE PROCESSING...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND METHOD OF PROCESSING SUBSTRATE

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

LIQUID PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS AND RECORD...

SUBSTRATE LIQUID PROCESSING METHOD, SUBSTRATE LIQUID PROCESSING APP...

SUBSTRATE LIQUID PROCESSING METHOD, SUBSTRATE LIQUID PROCESSING APP...

LIQUID PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND STORA...

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING...

LIQUID PROCESSING METHOD, LIQUID PROCESSING APPARATUS AND STORAGE M...

Substrate Liquid Processing Apparatus, Substrate Liquid Processing...

Substrate Processing Method and Substrate Processing Apparatus

Apparatus for Polishing Rear Surface of Substrate, System for Polis...

LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD, AND STORAGE...

POLYSILICON LAYER REMOVING METHOD AND STORAGE MEDIUM

Substrate processing method, substrate processing apparatus, and st...

Liquid processing method and liquid processing apparatus

Ozone processing apparatus and ozone processing method

Substrate processing method, substrate processing apparatus and com...

Substrate processing method and substrate processing apparatus

Substrate processing method and substrate processing apparatus

Substrate processing method and substrate processing apparatus

Cleaning processing method and cleaning processing apparatus