Mitsunori SUGIYAMA

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Polishing apparatus and polishing method
- Patent number 11,667,007
- Issue date Jun 6, 2023
- Ebara Corporation
- Mitsunori Sugiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Failure detection apparatus for substrate processing apparatus, and...
- Patent number 10,317,890
- Issue date Jun 11, 2019
- Ebara Corporation
- Mitsunori Sugiyama
- G05 - CONTROLLING REGULATING
Information Patent Grant
Substrate treatment apparatus and control device
- Patent number 9,904,280
- Issue date Feb 27, 2018
- Ebara Corporation
- Mitsunori Sugiyama
- G05 - CONTROLLING REGULATING
Information Patent Grant
Substrate processing apparatus
- Patent number 9,737,973
- Issue date Aug 22, 2017
- Ebara Corporation
- Mitsunori Sugiyama
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing method, polishing apparatus, and program for controlling...
- Patent number 8,165,710
- Issue date Apr 24, 2012
- Ebara Corporation
- Tsuneo Torikoshi
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
INFORMATION PROCESSING DEVICE AND INFORMATION PROCESSING METHOD
- Publication number 20240242960
- Publication date Jul 18, 2024
- EBARA CORPORATION
- MITSUNORI SUGIYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND NON-TRANSITORY COMPUTER READABLE...
- Publication number 20240045405
- Publication date Feb 8, 2024
- EBARA CORPORATION
- Mitsunori SUGIYAMA
- G05 - CONTROLLING REGULATING
Information Patent Application
POLISHING APPARATUS AND POLISHING METHOD
- Publication number 20190118332
- Publication date Apr 25, 2019
- EBARA CORPORATION
- Mitsunori SUGIYAMA
- B24 - GRINDING POLISHING
Information Patent Application
CONTROL DEVICE FOR SUBSTRATE TREATMENT APPARATUS, SUBSTRATE TREATME...
- Publication number 20180129189
- Publication date May 10, 2018
- EBARA CORPORATION
- Mitsunori SUGIYAMA
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20150290767
- Publication date Oct 15, 2015
- EBARA CORPORATION
- Mitsunori SUGIYAMA
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20150290766
- Publication date Oct 15, 2015
- EBARA CORPORATION
- Mitsunori SUGIYAMA
- B24 - GRINDING POLISHING
Information Patent Application
CALIBRATION DEVICE AND SUBSTRATE TREATMENT DEVICE
- Publication number 20150204711
- Publication date Jul 23, 2015
- EBARA CORPORATION
- Mitsunori Sugiyama
- G01 - MEASURING TESTING
Information Patent Application
FAILURE DETECTION APPARATUS FOR SUBSTRATE PROCESSING APPARATUS, AND...
- Publication number 20150198947
- Publication date Jul 16, 2015
- EBARA CORPORATION
- Mitsunori SUGIYAMA
- G05 - CONTROLLING REGULATING
Information Patent Application
CONTROL DEVICE FOR SUBSTRATE TREATMENT APPARATUS, SUBSTRATE TREATME...
- Publication number 20150192921
- Publication date Jul 9, 2015
- EBARA CORPORATION
- Mitsunori SUGIYAMA
- G05 - CONTROLLING REGULATING
Information Patent Application
Polishing method, polishing apparatus, and program for controlling...
- Publication number 20100015890
- Publication date Jan 21, 2010
- Tsuneo Torikoshi
- B24 - GRINDING POLISHING

Mitsunori SUGIYAMA

Person

Patents Grantslast 30 patents

Polishing apparatus and polishing method

Failure detection apparatus for substrate processing apparatus, and...

Substrate treatment apparatus and control device

Substrate processing apparatus

Polishing method, polishing apparatus, and program for controlling...

Patents Applicationslast 30 patents

INFORMATION PROCESSING DEVICE AND INFORMATION PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND NON-TRANSITORY COMPUTER READABLE...

POLISHING APPARATUS AND POLISHING METHOD

CONTROL DEVICE FOR SUBSTRATE TREATMENT APPARATUS, SUBSTRATE TREATME...

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

CALIBRATION DEVICE AND SUBSTRATE TREATMENT DEVICE

FAILURE DETECTION APPARATUS FOR SUBSTRATE PROCESSING APPARATUS, AND...

CONTROL DEVICE FOR SUBSTRATE TREATMENT APPARATUS, SUBSTRATE TREATME...

Polishing method, polishing apparatus, and program for controlling...