-
-
-
Plasma processing method and apparatus
-
Patent number 5,283,087
-
Issue date Feb 1, 1994
-
Semiconductor Energy Laboratory Co., Ltd.
-
Shunpei Yamazaki
-
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
-
Plasma processing method and apparatus
-
Patent number 5,256,483
-
Issue date Oct 26, 1993
-
Semiconductor Energy Laboratory Co., Ltd.
-
Shunpei Yamazaki
-
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
-
-
Apparatus and method for forming thin films
-
Patent number 5,079,031
-
Issue date Jan 7, 1992
-
Semiconductor Energy Laboratory Co., Ltd.
-
Shunpei Yamazaki
-
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
-
Plasma processing method and apparatus
-
Patent number 5,041,201
-
Issue date Aug 20, 1991
-
Semiconductor Energy Laboratory Co., Ltd.
-
Shunpei Yamazaki
-
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
-
Apparatus for forming thin films in quantity
-
Patent number 5,007,374
-
Issue date Apr 16, 1991
-
Semiconductor Energy Laboratory Co., Ltd.
-
Shunpei Yamazaki
-
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
-
Plasma processing method and apparatus
-
Patent number 4,987,004
-
Issue date Jan 22, 1991
-
Semiconductor Energy Laboratory Co., Ltd.
-
Shunpei Yamazaki
-
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
-
Plasma processing method and apparatus
-
Patent number 4,971,667
-
Issue date Nov 20, 1990
-
Semiconductor Energy Laboratory Co., Ltd.
-
Shunpei Yamazaki
-
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...