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Mitsuo AKATSU
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Tokyo, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Charged particle beam device and evacuation method for same
Patent number
10,304,655
Issue date
May 28, 2019
Hitachi High-Technologies Corporation
Yuuta Ebine
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device and installation method
Patent number
10,008,361
Issue date
Jun 26, 2018
Hitachi High-Technologies Corporation
Shuhei Yabu
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Charged Particle Beam Device and Evacuation Method for Same
Publication number
20180082819
Publication date
Mar 22, 2018
Hitachi High-Technologies Corporation
Yuuta EBINE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM DEVICE AND INSTALLATION METHOD
Publication number
20170169988
Publication date
Jun 15, 2017
Shuhei YABU
H01 - BASIC ELECTRIC ELEMENTS