Mitsuo HIRATA

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Utsunomiya-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Stage apparatus, lithography apparatus, method of manufacturing an...
- Patent number 9,720,334
- Issue date Aug 1, 2017
- Canon Kabushiki Kaisha
- Satoshi Maruyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method of manufacturing device
- Patent number 9,285,688
- Issue date Mar 15, 2016
- Canon Kabushiki Kaisha
- Tomohiro Harayama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Scanning exposure apparatus, control apparatus and method of manufa...
- Patent number 8,493,551
- Issue date Jul 23, 2013
- Canon Kabushiki Kaisha
- Youzou Fukagawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
STAGE APPARATUS, LITHOGRAPHY APPARATUS, METHOD OF MANUFACTURING AN...
- Publication number 20150362846
- Publication date Dec 17, 2015
- Canon Kabushiki Kaisha
- Satoshi Maruyama
- G01 - MEASURING TESTING
Information Patent Application
EXPOSURE APPARATUS AND METHOD OF MANUFACTURING DEVICE
- Publication number 20140104590
- Publication date Apr 17, 2014
- Canon Kabushiki Kaisha
- Tomohiro HARAYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING EXPOSURE APPARATUS, CONTROL APPARATUS AND METHOD OF MANUFA...
- Publication number 20110090475
- Publication date Apr 21, 2011
- Canon Kabushiki Kaisha
- Youzou Fukagawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY