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Mitsuo Hirose
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Tokyo, JP
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last 30 patents
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Patent Grant
Semiconductor fabrication equipment
Patent number
5,330,577
Issue date
Jul 19, 1994
Semiconductor Process Laboratory Co., Inc.
Kazuo Maeda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus for manufacturing semiconductor device
Patent number
5,302,209
Issue date
Apr 12, 1994
Semiconductor Process Laboratory Co., Ltd.
Kazuo Maeda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Semiconductor fabrication equipment
Patent number
5,281,295
Issue date
Jan 25, 1994
Semiconductor Process Laboratory Co., Ltd.
Kazuo Maeda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...