Mitsuo Kato

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Sagamihara, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing system, plasma measurement system, plasma measure...
- Patent number 8,241,457
- Issue date Aug 14, 2012
- Tokyo Electron Limited
- Mitsuo Kato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate detecting device for detecting the presence of a transpar...
- Patent number 5,354,995
- Issue date Oct 11, 1994
- Tokyo Electron Kabushiki Kaisha
- Shunetsu Endo
- G01 - MEASURING TESTING
Information Patent Grant
Substrate detecting system with edge detection, such as wafer or ba...
- Patent number 5,206,627
- Issue date Apr 27, 1993
- Tokyo Electron Sagami Limited
- Mitsuo Kato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vertical heat-treating apparatus
- Patent number 5,163,832
- Issue date Nov 17, 1992
- Tokyo Electron Sagami Limited
- Katsumi Ishii
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Substrate transfer device
- Patent number 5,030,056
- Issue date Jul 9, 1991
- Tokyo Electron Sagami Ltd.
- Hirofumi Kitayama
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING SYSTEM, PLASMA MEASUREMENT SYSTEM, PLASMA MEASURE...
- Publication number 20080241016
- Publication date Oct 2, 2008
- TOKYO ELECTRON LIMITED
- Mitsuo KATO
- H01 - BASIC ELECTRIC ELEMENTS