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Transfer apparatus
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Patent number 5,620,295
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Issue date Apr 15, 1997
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Tokyo Electron Limited
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Mitsuo Nishi
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H01 - BASIC ELECTRIC ELEMENTS
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Transfer apparatus
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Patent number 5,505,577
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Issue date Apr 9, 1996
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Tokyo Electron Limited
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Mitsuo Nishi
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H01 - BASIC ELECTRIC ELEMENTS
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Transfer apparatus
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Patent number 5,374,153
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Issue date Dec 20, 1994
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Tokyo Electron Limited
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Mitsuo Nishi
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H01 - BASIC ELECTRIC ELEMENTS
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Substrate washing device
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Patent number 5,370,142
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Issue date Dec 6, 1994
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Tokyo Electron Limited
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Mitsuo Nishi
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H01 - BASIC ELECTRIC ELEMENTS
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Cleaning apparatus
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Patent number 5,311,893
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Issue date May 17, 1994
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Tokyo Electron Limited
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Mitsuo Nishi
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H01 - BASIC ELECTRIC ELEMENTS
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Washing system
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Patent number 5,301,700
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Issue date Apr 12, 1994
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Tokyo Electron Limited
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Yuuji Kamikawa
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B08 - CLEANING
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Cleaning apparatus
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Patent number 5,265,632
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Issue date Nov 30, 1993
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Tokyo Electron Limited
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Mitsuo Nishi
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H01 - BASIC ELECTRIC ELEMENTS
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Transfer apparatus
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Patent number 5,253,663
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Issue date Oct 19, 1993
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Tokyo Electron Limited
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Hiroshi Tanaka
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H01 - BASIC ELECTRIC ELEMENTS
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Washing apparatus
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Patent number 5,226,437
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Issue date Jul 13, 1993
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Tokyo Electron Limited
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Yuji Kamikawa
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H01 - BASIC ELECTRIC ELEMENTS