Mitsuo Tabata

Person

Kawasaki, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Pattern inspection apparatus
- Patent number 7,068,364
- Issue date Jun 27, 2006
- Kabushiki Kaisha Toshiba
- Shinji Sugihara
- G01 - MEASURING TESTING
Information Patent Grant
Pattern inspection apparatus and pattern inspection method
- Patent number 6,909,501
- Issue date Jun 21, 2005
- Kabushiki Kaisha Toshiba
- Riki Ogawa
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Apparatus for inspecting slight defects on a photomask pattern
- Patent number 6,100,970
- Issue date Aug 8, 2000
- Kabushiki Kaisha Topcon
- Hisakazu Yoshino
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical substrate inspection apparatus
- Patent number 6,084,716
- Issue date Jul 4, 2000
- Kabushiki Kaisha Toshiba
- Yasushi Sanada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pattern defect inspection apparatus
- Patent number 5,995,219
- Issue date Nov 30, 1999
- Kabushiki Kaisha Toshiba
- Mitsuo Tabata
- G01 - MEASURING TESTING
Information Patent Grant
Sample inspection apparatus and sample inspection method
- Patent number 5,960,106
- Issue date Sep 28, 1999
- Kabushiki Kaisha Toshiba
- Hideo Tsuchiya
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Sample inspection apparatus and sample inspection method
- Patent number 5,828,457
- Issue date Oct 27, 1998
- Kabushiki Kaisha Toshiba
- Mitsuo Tabata
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for inspecting slight defects in a photomask p...
- Patent number 5,812,259
- Issue date Sep 22, 1998
- Kabushiki Kaisha Topcon
- Hisakazu Yoshino
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of inspecting a pattern formed on a sample for a defect, and...
- Patent number 5,744,381
- Issue date Apr 28, 1998
- Kabushiki Kaisha Toshiba
- Mitsuo Tabata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pattern evaluation apparatus and a method of pattern evaluation
- Patent number 5,602,645
- Issue date Feb 11, 1997
- Kabushiki Kaisha Toshiba
- Mitsuo Tabata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and system for generating a bit pattern
- Patent number 5,404,410
- Issue date Apr 4, 1995
- Kabushiki Kaisha Toshiba
- Toru Tojo
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for aligning first and second objects relative to each other...
- Patent number 4,811,062
- Issue date Mar 7, 1989
- Kabushiki Kaisha Toshiba
- Mitsuo Tabata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and device for aligning first and second objects relative to...
- Patent number 4,808,002
- Issue date Feb 28, 1989
- Kabushiki Kaisha Toshiba
- Toru Tojo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position detector by vibrating a light beam for averaging the refle...
- Patent number 4,698,513
- Issue date Oct 6, 1987
- Kabushiki Kaishi Toshiba
- Toru Tojo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position detecting method for detecting the relative positions of t...
- Patent number 4,642,468
- Issue date Feb 10, 1987
- Kabushiki Kaisha Toshiba
- Mitsuo Tabata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of aligning two members utilizing marks provided thereon
- Patent number 4,590,382
- Issue date May 20, 1986
- Kabushiki Kaisha Toshiba
- Mitsuo Tabata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Electron beam pattern transfer system having an autofocusing mechanism
- Patent number 4,572,956
- Issue date Feb 25, 1986
- Tokyo Shibaura Denki Kabushiki Kaisha
- Toru Tojo
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Image processing system
- Patent number 4,545,068
- Issue date Oct 1, 1985
- Tokyo Shibaura Denki Kabushiki Kaisha
- Mitsuo Tabata
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Image memory device
- Patent number 4,326,202
- Issue date Apr 20, 1982
- The President of the Agency of Industrial Science and Technology
- Masatsugu Kidode
- G09 - EDUCATION CRYPTOGRAPHY DISPLAY ADVERTISING SEALS

Patents Applicationslast 30 patents

Information Patent Application
Method of adjusting the level of a specimen surface
- Publication number 20040114824
- Publication date Jun 17, 2004
- Riki Ogawa
- G01 - MEASURING TESTING
Information Patent Application
Pattern inspection apparatus
- Publication number 20040070753
- Publication date Apr 15, 2004
- Shinji Sugihara
- G01 - MEASURING TESTING
Information Patent Application
Pattern inspection apparatus and pattern inspection method
- Publication number 20020037099
- Publication date Mar 28, 2002
- Riki Ogawa
- G06 - COMPUTING CALCULATING COUNTING

Mitsuo Tabata

Person

Patents Grantslast 30 patents

Pattern inspection apparatus

Pattern inspection apparatus and pattern inspection method

Apparatus for inspecting slight defects on a photomask pattern

Optical substrate inspection apparatus

Pattern defect inspection apparatus

Sample inspection apparatus and sample inspection method

Sample inspection apparatus and sample inspection method

Method and apparatus for inspecting slight defects in a photomask p...

Method of inspecting a pattern formed on a sample for a defect, and...

Pattern evaluation apparatus and a method of pattern evaluation

Method and system for generating a bit pattern

Method for aligning first and second objects relative to each other...

Method and device for aligning first and second objects relative to...

Position detector by vibrating a light beam for averaging the refle...

Position detecting method for detecting the relative positions of t...

Method of aligning two members utilizing marks provided thereon

Electron beam pattern transfer system having an autofocusing mechanism

Image processing system

Image memory device

Patents Applicationslast 30 patents

Method of adjusting the level of a specimen surface

Pattern inspection apparatus

Pattern inspection apparatus and pattern inspection method