Mitsuo Tada

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Polishing apparatus
- Patent number 10,933,507
- Issue date Mar 2, 2021
- Ebara Corporation
- Taro Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Metal detection sensor and metal detection method using same
- Patent number 10,739,488
- Issue date Aug 11, 2020
- Ebara Corporation
- Taro Takahashi
- G01 - MEASURING TESTING
Information Patent Grant
Substrate peripheral portion measuring device, and substrate periph...
- Patent number 10,134,614
- Issue date Nov 20, 2018
- Ebara Corporation
- Mitsuo Tada
- B24 - GRINDING POLISHING
Information Patent Grant
Eddy current sensor and polishing method
- Patent number 9,632,061
- Issue date Apr 25, 2017
- Ebara Corporation
- Taro Takahashi
- B24 - GRINDING POLISHING
Information Patent Grant
Method of correcting film thickness measurement value, film thickne...
- Patent number 9,437,507
- Issue date Sep 6, 2016
- Ebara Corporation
- Akira Nakamura
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus and polishing method
- Patent number 8,696,924
- Issue date Apr 15, 2014
- Ebara Corporation
- Mitsuo Tada
- B24 - GRINDING POLISHING
Information Patent Grant
Eddy current sensor and polishing method and apparatus
- Patent number 8,657,644
- Issue date Feb 25, 2014
- Ebara Corporation
- Mitsuo Tada
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing method
- Patent number 7,960,188
- Issue date Jun 14, 2011
- Ebara Corporation
- Shinrou Ohta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate polishing apparatus and substrate polishing method
- Patent number 7,854,646
- Issue date Dec 21, 2010
- Ebara Corporation
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Grant
Method of detecting characteristics of films using eddy current
- Patent number 7,714,572
- Issue date May 11, 2010
- Ebara Corporation
- Mitsuo Tada
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate polishing apparatus and substrate polishing method
- Patent number 7,670,206
- Issue date Mar 2, 2010
- Ebara Corporation
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Grant
Eddy current sensor
- Patent number 7,508,201
- Issue date Mar 24, 2009
- Ebara Corporation
- Mitsuo Tada
- G01 - MEASURING TESTING
Information Patent Grant
Polishing apparatus
- Patent number 7,258,595
- Issue date Aug 21, 2007
- Ebara Corporation
- Mitsuo Tada
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing device using eddy current sensor
- Patent number 7,078,894
- Issue date Jul 18, 2006
- Ebara Corporation
- Mitsuo Tada
- B24 - GRINDING POLISHING
Information Patent Grant
Frequency measuring device, polishing device using the same and edd...
- Patent number 7,046,001
- Issue date May 16, 2006
- Ebara Corporation
- Mitsuo Tada
- B24 - GRINDING POLISHING
Information Patent Grant
Measuring apparatus
- Patent number 6,935,935
- Issue date Aug 30, 2005
- Ebara Corporation
- Mitsuo Tada
- B24 - GRINDING POLISHING
Information Patent Grant
Measuring apparatus
- Patent number 6,746,319
- Issue date Jun 8, 2004
- Ebara Corporation
- Mitsuo Tada
- B24 - GRINDING POLISHING
Information Patent Grant
Plating device
- Patent number 6,517,689
- Issue date Feb 11, 2003
- Ebara Corporation
- Akihisa Hongo
- G01 - MEASURING TESTING
Information Patent Grant
Plating apparatus for detecting the conductivity between plating co...
- Patent number 6,500,317
- Issue date Dec 31, 2002
- Ebara Corporation
- Junichiro Yoshioka
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
METAL DETECTION SENSOR AND METAL DETECTION METHOD USING SAME
- Publication number 20190011591
- Publication date Jan 10, 2019
- EBARA CORPORATION
- Taro TAKAHASHI
- G01 - MEASURING TESTING
Information Patent Application
POLISHING APPARATUS
- Publication number 20170259394
- Publication date Sep 14, 2017
- EBARA CORPORATION
- Taro TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF CORRECTING FILM THICKNESS MEASUREMENT VALUE, FILM THICKNE...
- Publication number 20150262893
- Publication date Sep 17, 2015
- EBARA CORPORATION
- Akira NAKAMURA
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE PERIPHERAL PORTION MEASURING DEVICE, AND SUBSTRATE PERIPH...
- Publication number 20150101752
- Publication date Apr 16, 2015
- EBARA CORPORATION
- Mitsuo TADA
- G01 - MEASURING TESTING
Information Patent Application
EDDY CURRENT SENSOR AND POLISHING METHOD
- Publication number 20130260645
- Publication date Oct 3, 2013
- Taro Takahashi
- G01 - MEASURING TESTING
Information Patent Application
EDDY CURRENT SENSOR AND POLISHING METHOD AND APPARATUS
- Publication number 20120088438
- Publication date Apr 12, 2012
- Mitsuo TADA
- B24 - GRINDING POLISHING
Information Patent Application
EDDY CURRENT SENSOR AND POLISHING METHOD AND APPARATUS
- Publication number 20110124269
- Publication date May 26, 2011
- Mitsuo TADA
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE POLISHING APPARATUS AND SUBSTRATE POLISHING METHOD
- Publication number 20100112901
- Publication date May 6, 2010
- Tetsuji TOGAWA
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING METHOD
- Publication number 20090286332
- Publication date Nov 19, 2009
- Shinrou OHTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Peripheral Portion Measuring Device, and Substrate Periph...
- Publication number 20080274670
- Publication date Nov 6, 2008
- EBARA CORPORATION
- Mitsuo Tada
- B24 - GRINDING POLISHING
Information Patent Application
Substrate Polishing Apparatus And Substrate Polishing Method
- Publication number 20080139087
- Publication date Jun 12, 2008
- EBARA CORPORATION
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Application
Polishing apparatus and polishing method
- Publication number 20070239309
- Publication date Oct 11, 2007
- Mitsuo Tada
- B24 - GRINDING POLISHING
Information Patent Application
Eddy current sensor
- Publication number 20070103150
- Publication date May 10, 2007
- Mitsuo Tada
- G01 - MEASURING TESTING
Information Patent Application
Polishing device using eddy current sensor
- Publication number 20060214657
- Publication date Sep 28, 2006
- Mitsuo Tada
- B24 - GRINDING POLISHING
Information Patent Application
Measuring apparatus
- Publication number 20060164104
- Publication date Jul 27, 2006
- Mitsuo Tada
- G01 - MEASURING TESTING
Information Patent Application
Measuring apparatus
- Publication number 20040203328
- Publication date Oct 14, 2004
- Mitsuo Tada
- B24 - GRINDING POLISHING
Information Patent Application
Polishing apparatus
- Publication number 20040166773
- Publication date Aug 26, 2004
- Mitsuo Tada
- B24 - GRINDING POLISHING
Information Patent Application
Frequency measuring device, polishing device using the same and edd...
- Publication number 20040032256
- Publication date Feb 19, 2004
- Mitsuo Tada
- B24 - GRINDING POLISHING
Information Patent Application
Measuring apparatus
- Publication number 20030032377
- Publication date Feb 13, 2003
- Mitsuo Tada
- G01 - MEASURING TESTING
Information Patent Application
Frequency measuring device, polishing device using the same and edd...
- Publication number 20020047705
- Publication date Apr 25, 2002
- Mitsuo Tada
- G01 - MEASURING TESTING

Mitsuo Tada

Person

Patents Grantslast 30 patents

Polishing apparatus

Metal detection sensor and metal detection method using same

Substrate peripheral portion measuring device, and substrate periph...

Eddy current sensor and polishing method

Method of correcting film thickness measurement value, film thickne...

Polishing apparatus and polishing method

Eddy current sensor and polishing method and apparatus

Polishing method

Substrate polishing apparatus and substrate polishing method

Method of detecting characteristics of films using eddy current

Substrate polishing apparatus and substrate polishing method

Eddy current sensor

Polishing apparatus

Polishing device using eddy current sensor

Frequency measuring device, polishing device using the same and edd...

Measuring apparatus

Measuring apparatus

Plating device

Plating apparatus for detecting the conductivity between plating co...

Patents Applicationslast 30 patents

METAL DETECTION SENSOR AND METAL DETECTION METHOD USING SAME

POLISHING APPARATUS

METHOD OF CORRECTING FILM THICKNESS MEASUREMENT VALUE, FILM THICKNE...

SUBSTRATE PERIPHERAL PORTION MEASURING DEVICE, AND SUBSTRATE PERIPH...

EDDY CURRENT SENSOR AND POLISHING METHOD

EDDY CURRENT SENSOR AND POLISHING METHOD AND APPARATUS

EDDY CURRENT SENSOR AND POLISHING METHOD AND APPARATUS

SUBSTRATE POLISHING APPARATUS AND SUBSTRATE POLISHING METHOD

POLISHING METHOD

Substrate Peripheral Portion Measuring Device, and Substrate Periph...

Substrate Polishing Apparatus And Substrate Polishing Method

Polishing apparatus and polishing method

Eddy current sensor

Polishing device using eddy current sensor

Measuring apparatus

Measuring apparatus

Polishing apparatus

Frequency measuring device, polishing device using the same and edd...

Measuring apparatus

Frequency measuring device, polishing device using the same and edd...