Mitsuo Yabuta

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Samukawa, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method for fine pattern formation on a photoresist
- Patent number 4,590,149
- Issue date May 20, 1986
- Tokyo Ohka Kogyo Co., Ltd.
- Hisashi Nakane
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for fine pattern formation on a photoresist
- Patent number 4,588,675
- Issue date May 13, 1986
- Tok Yo Ohka Kogyo Co., Ltd.
- Hisashi Nakane
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY