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Mitsuo Yasaka
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KUMAMOTO, JP
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Patents Grants
last 30 patents
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Patent Grant
Plasma processing apparatus and method of suppressing abnormal disc...
Patent number
7,974,067
Issue date
Jul 5, 2011
Renesas Electronics Corporation
Natsuko Ito
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for detecting anomalous discharge in plasma pr...
Patent number
6,753,499
Issue date
Jun 22, 2004
Japan Science and Technology Corporation
Mitsuo Yasaka
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
Plasma processing apparatus and method of suppressing abnormal disc...
Publication number
20070058322
Publication date
Mar 15, 2007
NEC Electronics Corporation
Natsuko Ito
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Window type probe, plasma monitoring device, and plasma processing...
Publication number
20050194094
Publication date
Sep 8, 2005
Mitsuo Yasaka
H01 - BASIC ELECTRIC ELEMENTS