Mitsuro TANABE

Person

Toyama, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of manufacturing semiconductor device and non-transitory com...
- Patent number 10,978,310
- Issue date Apr 13, 2021
- Kokusai Electric Corporation
- Tsukasa Kamakura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Atomic layer deposition processing apparatus to reduce heat energy...
- Patent number 9,518,321
- Issue date Dec 13, 2016
- Hitachi Kokusai Electric Inc.
- Mitsuro Tanabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing semiconductor device and method for proces...
- Patent number 8,367,566
- Issue date Feb 5, 2013
- Hitachi Kokusai Electric Inc.
- Atsushi Sano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method for manufacturing semicon...
- Patent number 8,235,001
- Issue date Aug 7, 2012
- Hitachi Kokusai Electric Inc.
- Atsushi Sano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and semiconductor devices manufactur...
- Patent number 8,222,161
- Issue date Jul 17, 2012
- Hitachi Kokusai Electric Inc.
- Yoshihiko Yanagisawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and semiconductor device producing m...
- Patent number 8,172,950
- Issue date May 8, 2012
- Hitachi Kokusai Electric Inc.
- Yoshihiko Yanagisawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and semiconductor devices manufactur...
- Patent number 7,943,528
- Issue date May 17, 2011
- Hitachi Kokusai Electric Inc.
- Yoshihiko Yanagisawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Method of Manufacturing Semiconductor Device and Non-Transitory Com...
- Publication number 20190295854
- Publication date Sep 26, 2019
- Kokusai Electric Corporation
- Tsukasa KAMAKURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ATOMIC LAYER DEPOSITION PROCESSING APPARATUS TO REDUCE HEAT ENERGY...
- Publication number 20160032457
- Publication date Feb 4, 2016
- Hitachi Kokusai Electric Inc.
- Mitsuro TANABE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD FOR MANUFACTURING SEMICON...
- Publication number 20120276751
- Publication date Nov 1, 2012
- Hitachi Kokusai Electric Inc.
- Atsushi Sano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR DEVICES MANUFACTUR...
- Publication number 20110192347
- Publication date Aug 11, 2011
- Hitachi Kokusai Electric Inc.
- Yoshihiko YANAGISAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR DEVICES MANUFACTUR...
- Publication number 20110053382
- Publication date Mar 3, 2011
- Hitachi Kokusai Electric Inc.
- Yoshihiko YANAGISAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate processing apparatus and semiconductor device producing m...
- Publication number 20090017641
- Publication date Jan 15, 2009
- Hitachi Kokusai Electric Inc.
- Yoshihiko Yanagisawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate processing apparatus and method for manufacturing semicon...
- Publication number 20080264337
- Publication date Oct 30, 2008
- Hitachi Kokusai Electric Inc.
- Atsushi Sano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Mitsuro TANABE

Person

Patents Grantslast 30 patents

Method of manufacturing semiconductor device and non-transitory com...

Atomic layer deposition processing apparatus to reduce heat energy...

Method for manufacturing semiconductor device and method for proces...

Substrate processing apparatus and method for manufacturing semicon...

Substrate processing apparatus and semiconductor devices manufactur...

Substrate processing apparatus and semiconductor device producing m...

Substrate processing apparatus and semiconductor devices manufactur...

Patents Applicationslast 30 patents

Method of Manufacturing Semiconductor Device and Non-Transitory Com...

ATOMIC LAYER DEPOSITION PROCESSING APPARATUS TO REDUCE HEAT ENERGY...

SUBSTRATE PROCESSING APPARATUS AND METHOD FOR MANUFACTURING SEMICON...

SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR DEVICES MANUFACTUR...

SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR DEVICES MANUFACTUR...

Substrate processing apparatus and semiconductor device producing m...

Substrate processing apparatus and method for manufacturing semicon...