Mitsuru Fukuda

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Toyama, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus, method of monitoring abnormality of...
- Patent number 11,782,425
- Issue date Oct 10, 2023
- Kokusai Electric Corporation
- Kazuyoshi Yamamoto
- G05 - CONTROLLING REGULATING
Information Patent Grant
Substrate processing apparatus and controller
- Patent number 11,663,562
- Issue date May 30, 2023
- Kokusai Electric Corporation
- Mitsuru Fukuda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate processing apparatus and non-transitory computer-readable...
- Patent number 10,860,005
- Issue date Dec 8, 2020
- Kokusai Electric Corporation
- Kazuhide Asai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MONITORING ABNORMALITY OF...
- Publication number 20200201305
- Publication date Jun 25, 2020
- Kokusai Electric Corporation
- Kazuyoshi YAMAMOTO
- G05 - CONTROLLING REGULATING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND CONTROLLER
- Publication number 20190012847
- Publication date Jan 10, 2019
- Kokusai Electric Corporation
- Mitsuru FUKUDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND NON-TRANSITORY COMPUTER-READABLE...
- Publication number 20180120822
- Publication date May 3, 2018
- Hitachi Kokusai Electric Inc.
- Kazuhide ASAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of Manufacturing Semiconductor Device
- Publication number 20160284581
- Publication date Sep 29, 2016
- Hitachi Kokusai Electric Inc.
- Takeshi Yasui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing Apparatus, Method of Processing Substrate, Met...
- Publication number 20130243550
- Publication date Sep 19, 2013
- Hitachi Kokusai Electric Inc.
- Takeshi Yasui
- H01 - BASIC ELECTRIC ELEMENTS