Mitsuru Hashimoto

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Nirasaki-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method of cleaning plasma processing apparatus
- Patent number 10,975,468
- Issue date Apr 13, 2021
- Tokyo Electron Limited
- Hiroki Kishi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of cleaning plasma processing apparatus
- Patent number 10,053,773
- Issue date Aug 21, 2018
- Tokyo Electron Limited
- Hiroki Kishi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for etching layer to be etched
- Patent number 9,647,206
- Issue date May 9, 2017
- Tokyo Electron Limited
- Mitsuru Hashimoto
- G11 - INFORMATION STORAGE
Information Patent Grant
Substrate processing apparatus, substrate processing method, and pr...
- Patent number 8,785,216
- Issue date Jul 22, 2014
- Tokyo Electron Limited
- Satoshi Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ring mechanism, and plasma processing device using the ring mechanism
- Patent number 7,882,800
- Issue date Feb 8, 2011
- Tokyo Electron Limited
- Akira Koshiishi
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF CLEANING PLASMA PROCESSING APPARATUS
- Publication number 20180327901
- Publication date Nov 15, 2018
- TOKYO ELECTRON LIMITED
- Hiroki KISHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR ETCHING LAYER TO BE ETCHED
- Publication number 20160276582
- Publication date Sep 22, 2016
- TOKYO ELECTRON LIMITED
- Mitsuru HASHIMOTO
- G11 - INFORMATION STORAGE
Information Patent Application
METHOD OF CLEANING PLASMA PROCESSING APPARATUS
- Publication number 20150247235
- Publication date Sep 3, 2015
- TOKYO ELECTRON LIMITED
- Hiroki KISHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND PR...
- Publication number 20110139749
- Publication date Jun 16, 2011
- TOKYO ELECTRON LIMITED
- Satoshi Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus, substrate processing method, and pr...
- Publication number 20050233477
- Publication date Oct 20, 2005
- TOKYO ELECTRON LIMITED
- Satoshi Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ring mechanism, and plasma processing device using the ring mechanism
- Publication number 20050005859
- Publication date Jan 13, 2005
- Akira Koshiishi
- H01 - BASIC ELECTRIC ELEMENTS