MITSURU HIROSHIMA

Person

Osaka, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 11,398,372
- Issue date Jul 26, 2022
- PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Shogo Okita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing element chip and element chip
- Patent number 10,475,704
- Issue date Nov 12, 2019
- PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Atsushi Harikai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Element chip manufacturing method
- Patent number 10,236,266
- Issue date Mar 19, 2019
- PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Atsushi Harikai
- B44 - DECORATIVE ARTS
Information Patent Grant
Element chip and method for manufacturing the same
- Patent number 10,177,063
- Issue date Jan 8, 2019
- PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Bunzi Mizuno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Element chip manufacturing method
- Patent number 10,049,933
- Issue date Aug 14, 2018
- PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Atsushi Harikai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing element chip
- Patent number 9,941,167
- Issue date Apr 10, 2018
- PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Bunzi Mizuno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing element chip and element chip
- Patent number 9,922,899
- Issue date Mar 20, 2018
- PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Atsushi Harikai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Element chip and method for manufacturing the same
- Patent number 9,911,677
- Issue date Mar 6, 2018
- PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Bunzi Mizuno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming mask pattern, method of processing substrate, and...
- Patent number 9,905,452
- Issue date Feb 27, 2018
- PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Mitsuru Hiroshima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma treatment method and method of manufacturing electronic comp...
- Patent number 9,779,986
- Issue date Oct 3, 2017
- PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Atsushi Harikai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing element chip and element chip
- Patent number 9,698,073
- Issue date Jul 4, 2017
- PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Atsushi Harikai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and method
- Patent number 9,653,334
- Issue date May 16, 2017
- PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Noriyuki Matsubara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 9,583,355
- Issue date Feb 28, 2017
- PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Nobuhiro Nishizaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing method and apparatus
- Patent number 9,431,263
- Issue date Aug 30, 2016
- PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Atsushi Harikai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 8,906,249
- Issue date Dec 9, 2014
- Panasonic Corporation
- Mitsuru Hiroshima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 8,673,166
- Issue date Mar 18, 2014
- Panasonic Corporation
- Shogo Okita
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Wafer reclamation method and wafer reclamation apparatus
- Patent number 8,563,332
- Issue date Oct 22, 2013
- Panasonic Corporation
- Shogo Okita
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ELEMENT CHIP MANUFACTURING METHOD
- Publication number 20170345715
- Publication date Nov 30, 2017
- Panasonic Intellectual Property Management Co., Ltd.
- ATSUSHI HARIKAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELEMENT CHIP MANUFACTURING METHOD
- Publication number 20170345781
- Publication date Nov 30, 2017
- Panasonic Intellectual Property Management Co., Ltd.
- ATSUSHI HARIKAI
- B44 - DECORATIVE ARTS
Information Patent Application
ELEMENT CHIP AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20170263525
- Publication date Sep 14, 2017
- Panasonic Intellectual Property Management Co., Ltd.
- BUNZI MIZUNO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MANUFACTURING ELEMENT CHIP
- Publication number 20170263500
- Publication date Sep 14, 2017
- Panasonic Intellectual Property Management Co., Ltd.
- BUNZI MIZUNO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELEMENT CHIP AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20170263501
- Publication date Sep 14, 2017
- Panasonic Intellectual Property Management Co., Ltd.
- BUNZI MIZUNO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELEMENT CHIP AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20170263526
- Publication date Sep 14, 2017
- Panasonic Intellectual Property Management Co., Ltd.
- BUNZI MIZUNO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELEMENT CHIP AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20170263524
- Publication date Sep 14, 2017
- Panasonic Intellectual Property Management Co., Ltd.
- BUNZI MIZUNO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING ELEMENT CHIP AND ELEMENT CHIP
- Publication number 20170229365
- Publication date Aug 10, 2017
- Panasonic Intellectual Property Management Co., Ltd.
- ATSUSHI HARIKAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING ELEMENT CHIP AND ELEMENT CHIP
- Publication number 20170229366
- Publication date Aug 10, 2017
- Panasonic Intellectual Property Management Co., Ltd.
- ATSUSHI HARIKAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING ELEMENT CHIP AND ELEMENT CHIP
- Publication number 20170098591
- Publication date Apr 6, 2017
- Panasonic Intellectual Property Management Co., Ltd.
- ATSUSHI HARIKAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA TREATMENT METHOD AND METHOD OF MANUFACTURING ELECTRONIC COMP...
- Publication number 20170069536
- Publication date Mar 9, 2017
- Panasonic Intellectual Property Management Co., Ltd.
- ATSUSHI HARIKAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FORMING MASK PATTERN, METHOD OF PROCESSING SUBSTRATE, AND...
- Publication number 20170069522
- Publication date Mar 9, 2017
- Panasonic Intellectual Property Management Co., Ltd.
- Mitsuru HIROSHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20160064188
- Publication date Mar 3, 2016
- Panasonic Intellectual Property Management Co., Ltd.
- Shogo OKITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING METHOD AND APPARATUS
- Publication number 20150340208
- Publication date Nov 26, 2015
- Panasonic Intellectual Property Management Co., Ltd.
- Atsushi HARIKAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS AND METHOD
- Publication number 20150340203
- Publication date Nov 26, 2015
- Panasonic Intellectual Property Management Co., Ltd.
- Noriyuki MATSUBARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20140332497
- Publication date Nov 13, 2014
- PANASONIC CORPORATION
- Nobuhiro NISHIZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20140335696
- Publication date Nov 13, 2014
- PANASONIC CORPORATION
- Nobuhiro NISHIZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20110111601
- Publication date May 12, 2011
- Shogo Okita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER RECLAMATION METHOD AND WAFER RECLAMATION APPARATUS
- Publication number 20100173431
- Publication date Jul 8, 2010
- PANASONIC CORPORATION
- Shogo Okita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20100089870
- Publication date Apr 15, 2010
- Mitsuru Hiroshima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20090218045
- Publication date Sep 3, 2009
- Mitsuru Hiroshima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma Processing Apparatus
- Publication number 20080138993
- Publication date Jun 12, 2008
- Mitsuru Hiroshima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma etching method
- Publication number 20070131652
- Publication date Jun 14, 2007
- Mitsuhiro Okune
- H01 - BASIC ELECTRIC ELEMENTS

MITSURU HIROSHIMA

Person

Patents Grantslast 30 patents

Plasma processing apparatus and plasma processing method

Method of manufacturing element chip and element chip

Element chip manufacturing method

Element chip and method for manufacturing the same

Element chip manufacturing method

Method for manufacturing element chip

Method of manufacturing element chip and element chip

Element chip and method for manufacturing the same

Method of forming mask pattern, method of processing substrate, and...

Plasma treatment method and method of manufacturing electronic comp...

Method of manufacturing element chip and element chip

Plasma processing apparatus and method

Plasma processing apparatus and plasma processing method

Plasma processing method and apparatus

Plasma processing apparatus and plasma processing method

Plasma processing apparatus and plasma processing method

Wafer reclamation method and wafer reclamation apparatus

Patents Applicationslast 30 patents

ELEMENT CHIP MANUFACTURING METHOD

ELEMENT CHIP MANUFACTURING METHOD

ELEMENT CHIP AND METHOD FOR MANUFACTURING THE SAME

METHOD FOR MANUFACTURING ELEMENT CHIP

ELEMENT CHIP AND METHOD FOR MANUFACTURING THE SAME

ELEMENT CHIP AND METHOD FOR MANUFACTURING THE SAME

ELEMENT CHIP AND METHOD FOR MANUFACTURING THE SAME

METHOD OF MANUFACTURING ELEMENT CHIP AND ELEMENT CHIP

METHOD OF MANUFACTURING ELEMENT CHIP AND ELEMENT CHIP

METHOD OF MANUFACTURING ELEMENT CHIP AND ELEMENT CHIP

PLASMA TREATMENT METHOD AND METHOD OF MANUFACTURING ELECTRONIC COMP...

METHOD OF FORMING MASK PATTERN, METHOD OF PROCESSING SUBSTRATE, AND...

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

PLASMA PROCESSING METHOD AND APPARATUS

PLASMA PROCESSING APPARATUS AND METHOD

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

WAFER RECLAMATION METHOD AND WAFER RECLAMATION APPARATUS

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

PLASMA PROCESSING APPARATUS

Plasma Processing Apparatus

Plasma etching method