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Mitsuru Hiura
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Utsunomiya-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Imprint apparatus
Patent number
10,073,339
Issue date
Sep 11, 2018
Canon Kabushiki Kaisha
Kazuki Nakagawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Imprint apparatus and article manufacturing method
Patent number
9,910,351
Issue date
Mar 6, 2018
Canon Kabushiki Kaisha
Ken-ichiro Shinoda
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Grant
Imprint apparatus
Patent number
9,851,634
Issue date
Dec 26, 2017
Canon Kabushiki Kaisha
Yozo Matsuda
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Grant
Imprint apparatus including alignment and overlay measurement
Patent number
9,616,613
Issue date
Apr 11, 2017
Canon Kabushiki Kaisha
Akiyoshi Suzuki
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Grant
Imprint apparatus and article manufacturing method
Patent number
9,541,825
Issue date
Jan 10, 2017
Canon Kabushiki Kaisha
Ken-ichiro Shinoda
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Grant
Imprinting method, imprinting apparatus, and device manufacturing m...
Patent number
9,442,370
Issue date
Sep 13, 2016
Canon Kabushiki Kaisha
Hiroshi Sato
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus and device manufacturing method
Patent number
7,295,285
Issue date
Nov 13, 2007
Canon Kabushiki Kaisha
Mitsuru Hiura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus and device fabrication method using the same
Patent number
7,274,435
Issue date
Sep 25, 2007
Canon Kabushiki Kaisha
Mitsuru Hiura
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Exposure apparatus and device manufacturing method using the same
Patent number
6,891,175
Issue date
May 10, 2005
Canon Kabushiki Kaisha
Mitsuru Hiura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD
Publication number
20170080633
Publication date
Mar 23, 2017
Canon Kabushiki Kaisha
Ken-ichiro Shinoda
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Application
IMPRINT APPARATUS, IMPRINT METHOD, AND METHOD OF MANUFACTURING ARTICLE
Publication number
20150190961
Publication date
Jul 9, 2015
Canon Kabushiki Kaisha
Kazuki Nakagawa
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Application
IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD USING SAME
Publication number
20150001751
Publication date
Jan 1, 2015
Yozo Matsuda
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Application
IMPRINTING METHOD, IMPRINTING APPARATUS, AND DEVICE MANUFACTURING M...
Publication number
20140346700
Publication date
Nov 27, 2014
Canon Kabushiki Kaisha
Hiroshi Sato
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE
Publication number
20130193602
Publication date
Aug 1, 2013
Canon Kabushiki Kaisha
Akiyoshi Suzuki
B82 - NANO-TECHNOLOGY
Information
Patent Application
IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD
Publication number
20130181365
Publication date
Jul 18, 2013
Canon Kabushiki Kaisha
Ken-ichiro Shinoda
B82 - NANO-TECHNOLOGY
Information
Patent Application
Exposure apparatus and device manufacturing method
Publication number
20060214118
Publication date
Sep 28, 2006
Canon Kabushiki Kaisha
Mitsuru Hiura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Exposure apparatus and device fabrication method using the same
Publication number
20050225739
Publication date
Oct 13, 2005
Mitsuru Hiura
G02 - OPTICS
Information
Patent Application
Exposure apparatus and device manufacturing method using the same
Publication number
20020024646
Publication date
Feb 28, 2002
Mitsuru Hiura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY