Mitsuru MIYAZAKI

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate cleaning apparatus and cleaning method of substrate
- Patent number 12,100,587
- Issue date Sep 24, 2024
- Ebara Corporation
- Fumitoshi Oikawa
- B08 - CLEANING
Information Patent Grant
Substrate supporting apparatus and method of controlling substrate...
- Patent number 12,094,754
- Issue date Sep 17, 2024
- Ebara Corporation
- Mitsuru Miyazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Jig and installation method using same jig
- Patent number 12,053,851
- Issue date Aug 6, 2024
- Ebara Corporation
- Lien Yin Cheng
- B24 - GRINDING POLISHING
Information Patent Grant
Transport apparatus and substrate processing apparatus
- Patent number 12,046,500
- Issue date Jul 23, 2024
- Ebara Corporation
- Hao Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Damper control system and damper control method
- Patent number 11,967,508
- Issue date Apr 23, 2024
- Ebara Corporation
- Akira Imamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning apparatus and polishing apparatus
- Patent number 11,948,811
- Issue date Apr 2, 2024
- Ebara Corporation
- Mitsuru Miyazaki
- B08 - CLEANING
Information Patent Grant
Substrate support mechanism, substrate cleaning device and substrat...
- Patent number 11,948,827
- Issue date Apr 2, 2024
- Ebara Corporation
- Mitsuru Miyazaki
- B08 - CLEANING
Information Patent Grant
Cleaning member mounting mechanism and substrate cleaning apparatus
- Patent number 11,894,244
- Issue date Feb 6, 2024
- Ebara Corporation
- Mitsuru Miyazaki
- B08 - CLEANING
Information Patent Grant
Sensor target cover used in combination with liquid level detection...
- Patent number 11,846,536
- Issue date Dec 19, 2023
- Ebara Corporation
- Naoki Toyomura
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate support apparatus and substrate cleaning apparatus
- Patent number 11,766,756
- Issue date Sep 26, 2023
- Ebara Corporation
- Mitsuru Miyazaki
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate processing apparatus
- Patent number 11,731,240
- Issue date Aug 22, 2023
- Ebara Corporation
- Kuniaki Yamaguchi
- B24 - GRINDING POLISHING
Information Patent Grant
Roller shaft for substrate cleaning
- Patent number D992845
- Issue date Jul 18, 2023
- Ebara Corporation
- Tomoaki Fujimoto
- D32 - Washing, cleaning, or drying machine
Information Patent Grant
Substrate processing apparatus, substrate processing method, substr...
- Patent number 11,426,834
- Issue date Aug 30, 2022
- Ebara Corporation
- Mitsuru Miyazaki
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate processing apparatus, method of detaching substrate from...
- Patent number 11,195,736
- Issue date Dec 7, 2021
- Ebara Corporation
- Naoki Toyomura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Buff processing device and substrate processing device
- Patent number 11,103,972
- Issue date Aug 31, 2021
- Ebara Corporation
- Hideo Aizawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning liquid supplying system, substrate processing apparatus an...
- Patent number 11,090,692
- Issue date Aug 17, 2021
- Ebara Corporation
- Mitsuru Miyazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Table for holding workpiece and processing apparatus with the table
- Patent number 10,898,987
- Issue date Jan 26, 2021
- Ebara Corporation
- Naoki Toyomura
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate cleaning device, substrate cleaning apparatus, method for...
- Patent number 10,879,086
- Issue date Dec 29, 2020
- Ebara Corporation
- Takeshi Sakurai
- B08 - CLEANING
Information Patent Grant
Substrate holding apparatus
- Patent number 10,847,407
- Issue date Nov 24, 2020
- Ebara Corporation
- Naoki Toyomura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cleaning apparatus and substrate processing apparatus
- Patent number 10,575,697
- Issue date Mar 3, 2020
- Ebara Corporation
- Akira Imamura
- A47 - FURNITURE DOMESTIC ARTICLES OR APPLIANCES COFFEE MILLS SPICE MILLS SUCT...
Information Patent Grant
Cleaning apparatus and substrate processing apparatus
- Patent number 10,573,509
- Issue date Feb 25, 2020
- Ebara Corporation
- Koji Maeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cleaning apparatus and substrate processing apparatus
- Patent number 10,546,764
- Issue date Jan 28, 2020
- Ebara Corporation
- Akira Imamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 10,500,691
- Issue date Dec 10, 2019
- Ebara Corporation
- Masayoshi Imai
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate processing apparatus, substrate processing method, substr...
- Patent number 10,486,285
- Issue date Nov 26, 2019
- Ebara Corporation
- Mitsuru Miyazaki
- B24 - GRINDING POLISHING
Information Patent Grant
Cleaning apparatus and substrate processing apparatus
- Patent number 10,438,817
- Issue date Oct 8, 2019
- Ebara Corporation
- Haiyang Xu
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus and pipe cleaning method for substra...
- Patent number 10,438,818
- Issue date Oct 8, 2019
- Ebara Corporation
- Junji Kunisawa
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus
- Patent number 10,201,888
- Issue date Feb 12, 2019
- Ebara Corporation
- Kuniaki Yamaguchi
- B08 - CLEANING
Information Patent Grant
Substrate holding apparatus
- Patent number 10,121,692
- Issue date Nov 6, 2018
- Ebara Corporation
- Naoki Toyomura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cleaning device, substrate cleaning apparatus, method for...
- Patent number 10,032,655
- Issue date Jul 24, 2018
- Ebara Corporation
- Takeshi Sakurai
- B08 - CLEANING
Information Patent Grant
Substrate gripping apparatus
- Patent number 9,892,953
- Issue date Feb 13, 2018
- Ebara Corporation
- Mitsuru Miyazaki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240416390
- Publication date Dec 19, 2024
- EBARA CORPORATION
- Naoki TOYOMURA
- B08 - CLEANING
Information Patent Application
SUBSTRATE SUPPORTING APPARATUS AND METHOD OF CONTROLLING SUBSTRATE...
- Publication number 20240413003
- Publication date Dec 12, 2024
- EBARA CORPORATION
- Mitsuru MIYAZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CLEANING DEVICE, SUBSTRATE PROCESSING DEVICE, AND MAINTEN...
- Publication number 20240383011
- Publication date Nov 21, 2024
- EBARA CORPORATION
- Shuichi SUEMASA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240363372
- Publication date Oct 31, 2024
- EBARA CORPORATION
- Mitsuru MIYAZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING APPARATUS AND POLISHING APPARATUS
- Publication number 20240194498
- Publication date Jun 13, 2024
- EBARA CORPORATION
- Mitsuru MIYAZAKI
- B08 - CLEANING
Information Patent Application
SUBSTRATE CLAMPING APPARATUS
- Publication number 20240082987
- Publication date Mar 14, 2024
- EBARA CORPORATION
- Daichi KONDO
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD
- Publication number 20240075503
- Publication date Mar 7, 2024
- EBARA CORPORATION
- Fumitoshi OIKAWA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20230405762
- Publication date Dec 21, 2023
- EBARA CORPORATION
- Kuniaki YAMAGUCHI
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE CLAMPING APPARATUS
- Publication number 20230390898
- Publication date Dec 7, 2023
- EBARA CORPORATION
- Daichi KONDO
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND PROCESSING METHOD
- Publication number 20230352326
- Publication date Nov 2, 2023
- EBARA CORPORATION
- Kuniaki YAMAGUCHI
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, COMPUTER-READABLE STORAGE MEDIUM ST...
- Publication number 20230230857
- Publication date Jul 20, 2023
- EBARA CORPORATION
- Masayoshi IMAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSPORT APPARATUS AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20230005773
- Publication date Jan 5, 2023
- EBARA CORPORATION
- HAO YU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORT MECHANISM, SUBSTRATE CLEANING DEVICE AND SUBSTRAT...
- Publication number 20220401997
- Publication date Dec 22, 2022
- EBARA CORPORATION
- MITSURU MIYAZAKI
- B08 - CLEANING
Information Patent Application
SUBSTRATE CLEANING DEVICE AND SUBSTRATE PROCESSING DEVICE
- Publication number 20220402003
- Publication date Dec 22, 2022
- EBARA CORPORATION
- YOHEI ETO
- B08 - CLEANING
Information Patent Application
DAMPER CONTROL SYSTEM AND DAMPER CONTROL METHOD
- Publication number 20220319874
- Publication date Oct 6, 2022
- EBARA CORPORATION
- Akira IMAMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING MEMBER MOUNTING MECHANISM AND SUBSTRATE CLEANING APPARATUS
- Publication number 20210384048
- Publication date Dec 9, 2021
- EBARA CORPORATION
- Mitsuru Miyazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING APPARATUS AND POLISHING APPARATUS
- Publication number 20210202273
- Publication date Jul 1, 2021
- EBARA CORPORATION
- Mitsuru MIYAZAKI
- B08 - CLEANING
Information Patent Application
SUBSTRATE CLEANING APPARATUS AND CLEANING METHOD OF SUBSTRATE
- Publication number 20210111018
- Publication date Apr 15, 2021
- EBARA CORPORATION
- Fumitoshi OIKAWA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND PROCESSING METHOD
- Publication number 20210013071
- Publication date Jan 14, 2021
- EBARA CORPORATION
- Kuniaki YAMAGUCHI
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE SUPPORTING APPARATUS AND METHOD OF CONTROLLING SUBSTRATE...
- Publication number 20200321237
- Publication date Oct 8, 2020
- EBARA CORPORATION
- Mitsuru MIYAZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT APPARATUS AND SUBSTRATE CLEANING APPARATUS
- Publication number 20200316742
- Publication date Oct 8, 2020
- EBARA CORPORATION
- Mitsuru Miyazaki
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, SUBSTR...
- Publication number 20200047309
- Publication date Feb 13, 2020
- Mitsuru MIYAZAKI
- B24 - GRINDING POLISHING
Information Patent Application
SENSOR TARGET COVER USED IN COMBINATION WITH LIQUID LEVEL DETECTION...
- Publication number 20200049546
- Publication date Feb 13, 2020
- EBARA CORPORATION
- Naoki TOYOMURA
- B08 - CLEANING
Information Patent Application
JIG AND INSTALLATION METHOD USING SAME JIG
- Publication number 20200009702
- Publication date Jan 9, 2020
- EBARA CORPORATION
- Lien Yin CHENG
- B08 - CLEANING
Information Patent Application
CLEANING LIQUID SUPPLYING SYSTEM, SUBSTRATE PROCESSING APPARATUS AN...
- Publication number 20190308223
- Publication date Oct 10, 2019
- EBARA CORPORATION
- Mitsuru MIYAZAKI
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20190118338
- Publication date Apr 25, 2019
- EBARA CORPORATION
- Kuniaki YAMAGUCHI
- B08 - CLEANING
Information Patent Application
BUFF PROCESSING DEVICE AND SUBSTRATE PROCESSING DEVICE
- Publication number 20180345452
- Publication date Dec 6, 2018
- EBARA CORPORATION
- Hideo AIZAWA
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE CLEANING DEVICE, SUBSTRATE CLEANING APPARATUS, METHOD FOR...
- Publication number 20180308716
- Publication date Oct 25, 2018
- EBARA CORPORATION
- Takeshi SAKURAI
- B08 - CLEANING
Information Patent Application
SUBSTRATE CLEANING APPARATUS AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20180289230
- Publication date Oct 11, 2018
- EBARA CORPORATION
- Akira IMAMURA
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20180056470
- Publication date Mar 1, 2018
- EBARA CORPORATION
- Masayoshi IMAI
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...

Mitsuru MIYAZAKI

Person

Patents Grantslast 30 patents

Substrate cleaning apparatus and cleaning method of substrate

Substrate supporting apparatus and method of controlling substrate...

Jig and installation method using same jig

Transport apparatus and substrate processing apparatus

Damper control system and damper control method

Cleaning apparatus and polishing apparatus

Substrate support mechanism, substrate cleaning device and substrat...

Cleaning member mounting mechanism and substrate cleaning apparatus

Sensor target cover used in combination with liquid level detection...

Substrate support apparatus and substrate cleaning apparatus

Substrate processing apparatus

Roller shaft for substrate cleaning

Substrate processing apparatus, substrate processing method, substr...

Substrate processing apparatus, method of detaching substrate from...

Buff processing device and substrate processing device

Cleaning liquid supplying system, substrate processing apparatus an...

Table for holding workpiece and processing apparatus with the table

Substrate cleaning device, substrate cleaning apparatus, method for...

Substrate holding apparatus

Substrate cleaning apparatus and substrate processing apparatus

Cleaning apparatus and substrate processing apparatus

Substrate cleaning apparatus and substrate processing apparatus

Substrate processing apparatus and substrate processing method

Substrate processing apparatus, substrate processing method, substr...

Cleaning apparatus and substrate processing apparatus

Substrate processing apparatus and pipe cleaning method for substra...

Substrate processing apparatus

Substrate holding apparatus

Substrate cleaning device, substrate cleaning apparatus, method for...

Substrate gripping apparatus

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE SUPPORTING APPARATUS AND METHOD OF CONTROLLING SUBSTRATE...

SUBSTRATE CLEANING DEVICE, SUBSTRATE PROCESSING DEVICE, AND MAINTEN...

SUBSTRATE PROCESSING APPARATUS

CLEANING APPARATUS AND POLISHING APPARATUS

SUBSTRATE CLAMPING APPARATUS

SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE CLAMPING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS, COMPUTER-READABLE STORAGE MEDIUM ST...

TRANSPORT APPARATUS AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE SUPPORT MECHANISM, SUBSTRATE CLEANING DEVICE AND SUBSTRAT...

SUBSTRATE CLEANING DEVICE AND SUBSTRATE PROCESSING DEVICE

DAMPER CONTROL SYSTEM AND DAMPER CONTROL METHOD

CLEANING MEMBER MOUNTING MECHANISM AND SUBSTRATE CLEANING APPARATUS

CLEANING APPARATUS AND POLISHING APPARATUS

SUBSTRATE CLEANING APPARATUS AND CLEANING METHOD OF SUBSTRATE

SUBSTRATE PROCESSING APPARATUS AND PROCESSING METHOD

SUBSTRATE SUPPORTING APPARATUS AND METHOD OF CONTROLLING SUBSTRATE...

SUBSTRATE SUPPORT APPARATUS AND SUBSTRATE CLEANING APPARATUS

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, SUBSTR...

SENSOR TARGET COVER USED IN COMBINATION WITH LIQUID LEVEL DETECTION...

JIG AND INSTALLATION METHOD USING SAME JIG

CLEANING LIQUID SUPPLYING SYSTEM, SUBSTRATE PROCESSING APPARATUS AN...

SUBSTRATE PROCESSING APPARATUS

BUFF PROCESSING DEVICE AND SUBSTRATE PROCESSING DEVICE

SUBSTRATE CLEANING DEVICE, SUBSTRATE CLEANING APPARATUS, METHOD FOR...

SUBSTRATE CLEANING APPARATUS AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD