Mitsuru Obara

Follow

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Magnetic annealing apparatus
- Patent number 10,297,481
- Issue date May 21, 2019
- Tokyo Electron Limited
- Yuji Ono
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Clamp apparatus, substrate carry-in/out apparatus using the same, a...
- Patent number 9,857,124
- Issue date Jan 2, 2018
- Tokyo Electron Limited
- Mitsuru Obara
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Magnetic annealing apparatus
- Patent number 9,508,914
- Issue date Nov 29, 2016
- Tokyo Electron Limited
- Yuji Ono
- C21 - METALLURGY OF IRON
Information Patent Grant
Substrate transfer apparatus, substrate transfer method, and storag...
- Patent number 8,029,224
- Issue date Oct 4, 2011
- Tokyo Electron Limited
- Yo Abe
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Vertical heat treating equipment
- Patent number 6,957,956
- Issue date Oct 25, 2005
- Tokyo Electron Limited
- Katsuya Toba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Notch alignment apparatus and adjustment jig for the same
- Patent number 5,970,818
- Issue date Oct 26, 1999
- Tokyo Electron Limited
- Hisashi Kikuchi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CONTROLLING METHOD AND SUBSTRATE TRANSPORT MODULE
- Publication number 20220238359
- Publication date Jul 28, 2022
- TOKYO ELECTRON LIMITED
- Hiroto Sato
- G05 - CONTROLLING REGULATING
Information Patent Application
CLAMP APPARATUS, SUBSTRATE CARRY-IN/OUT APPARATUS USING THE SAME, A...
- Publication number 20160273836
- Publication date Sep 22, 2016
- TOKYO ELECTRON LIMITED
- Mitsuru Obara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MAGNETIC ANNEALING APPARATUS
- Publication number 20140284321
- Publication date Sep 25, 2014
- TOKYO ELECTRON LIMITED
- Yuji Ono
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MAGNETIC ANNEALING APPARATUS
- Publication number 20140287926
- Publication date Sep 25, 2014
- TOKYO ELECTRON LIMITED
- Yuji Ono
- C21 - METALLURGY OF IRON
Information Patent Application
Substrate transfer apparatus, substrate transfer method, and storag...
- Publication number 20080232937
- Publication date Sep 25, 2008
- TOKYO ELECTRON LIMITED
- Yo Abe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Vertical heat treating equipment
- Publication number 20050175952
- Publication date Aug 11, 2005
- TOKYO ELECTRON LIMITED
- Katsuya Toba
- H01 - BASIC ELECTRIC ELEMENTS