Mitsuru Uda

Person

Kouga-gun, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Macro inspection apparatus and microscopic inspection method
- Patent number 7,719,672
- Issue date May 18, 2010
- International Business Machines Corporation
- Atsushi Kohayase
- G01 - MEASURING TESTING
Information Patent Grant
Inspection apparatus and inspection method for pattern profile, and...
- Patent number 7,525,651
- Issue date Apr 28, 2009
- International Business Machines Corporation
- Mitsuru Uda
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for color filter inspection
- Patent number 7,440,118
- Issue date Oct 21, 2008
- International Business Machines Corporation
- Mitsuru Uda
- G01 - MEASURING TESTING
Information Patent Grant
Inspection device and inspection method for pattern profile, exposu...
- Patent number 7,310,141
- Issue date Dec 18, 2007
- International Business Machines Corporation
- Mitsuru Uda
- G01 - MEASURING TESTING
Information Patent Grant
Dual peak wavelength tube, illuminator for inspection, inspecting a...
- Patent number 6,825,924
- Issue date Nov 30, 2004
- International Business Machines Corporation
- Mitsuru Uda
- G01 - MEASURING TESTING
Information Patent Grant
Liquid crystal light valve and method for producing same, and liqui...
- Patent number 6,781,650
- Issue date Aug 24, 2004
- International Business Machines Corporation
- Evan George Colgan
- G02 - OPTICS
Information Patent Grant
Film thickness testing apparatus and method
- Patent number 6,654,129
- Issue date Nov 25, 2003
- International Business Machines Corporation
- Mitsuru Uda
- G01 - MEASURING TESTING
Information Patent Grant
Reflection type liquid crystal device, manufacturing method therefo...
- Patent number 6,614,502
- Issue date Sep 2, 2003
- International Business Machines Corporation
- Masami Shinohara
- G02 - OPTICS
Information Patent Grant
Illuminator for macro inspection, macro inspecting apparatus and ma...
- Patent number 6,452,671
- Issue date Sep 17, 2002
- International Business Machines Corporation
- Mitsuru Uda
- G01 - MEASURING TESTING
Information Patent Grant
Reflection type liquid crystal device, manufacturing method therefo...
- Patent number 6,292,246
- Issue date Sep 18, 2001
- International Business Machines Corporation
- Masami Shinohara
- G02 - OPTICS
Information Patent Grant
Positioning of posts in liquid crystal valves for a projection disp...
- Patent number 6,040,888
- Issue date Mar 21, 2000
- International Business Machines Corporation
- Shinohara Masami
- G02 - OPTICS
Information Patent Grant
Liquid crystal display device and a method of fabricating same
- Patent number 5,739,890
- Issue date Apr 14, 1998
- International Business Machines Corporation
- Mitsuru Uda
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
MACRO INSPECTION APPARATUS AND MICROSCOPIC INSPECTION METHOD
- Publication number 20090147248
- Publication date Jun 11, 2009
- Atsushi Kohayase
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION APPARATUS AND INSPECTION METHOD FOR PATTERN PROFILE, AND...
- Publication number 20080192257
- Publication date Aug 14, 2008
- International Business Machines Corporation
- Mitsuru Uda
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHOD FOR COLOR FILTER INSPECTION
- Publication number 20060290922
- Publication date Dec 28, 2006
- International Business Machines Corporation
- Mitsuru Uda
- G01 - MEASURING TESTING
Information Patent Application
Inspection device and inspection method for pattern profile, exposu...
- Publication number 20050116187
- Publication date Jun 2, 2005
- Mitsuru Uda
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for inspecting resist pattern
- Publication number 20020113959
- Publication date Aug 22, 2002
- International Business Machines Corporation
- Mitsuru Uda
- G01 - MEASURING TESTING
Information Patent Application
Reflection type liquid crystal device, manufacturing method therefo...
- Publication number 20010030725
- Publication date Oct 18, 2001
- International Business Machines Corporation
- Masami Shinohara
- G02 - OPTICS
Information Patent Application
Dual peak wavelength tube, illuminator for inspection, inspecting a...
- Publication number 20010015800
- Publication date Aug 23, 2001
- Mitsuru Uda
- G01 - MEASURING TESTING

Mitsuru Uda

Person

Patents Grantslast 30 patents

Macro inspection apparatus and microscopic inspection method

Inspection apparatus and inspection method for pattern profile, and...

Apparatus and method for color filter inspection

Inspection device and inspection method for pattern profile, exposu...

Dual peak wavelength tube, illuminator for inspection, inspecting a...

Liquid crystal light valve and method for producing same, and liqui...

Film thickness testing apparatus and method

Reflection type liquid crystal device, manufacturing method therefo...

Illuminator for macro inspection, macro inspecting apparatus and ma...

Reflection type liquid crystal device, manufacturing method therefo...

Positioning of posts in liquid crystal valves for a projection disp...

Liquid crystal display device and a method of fabricating same

Patents Applicationslast 30 patents

MACRO INSPECTION APPARATUS AND MICROSCOPIC INSPECTION METHOD

INSPECTION APPARATUS AND INSPECTION METHOD FOR PATTERN PROFILE, AND...

APPARATUS AND METHOD FOR COLOR FILTER INSPECTION

Inspection device and inspection method for pattern profile, exposu...

Method and apparatus for inspecting resist pattern

Reflection type liquid crystal device, manufacturing method therefo...

Dual peak wavelength tube, illuminator for inspection, inspecting a...