Mitsusuke Kyogoku

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Patents Grantslast 30 patents

Information Patent Grant
Sealing mechanism of multi-chamber load-locking device
- Patent number 6,743,329
- Issue date Jun 1, 2004
- ASM Japan K.K.
- Mitsusuke Kyogoku
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device and method for load locking for semiconductor processing
- Patent number 6,053,686
- Issue date Apr 25, 2000
- ASM Japan K.K.
- Mitsusuke Kyogoku
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vapor selective etching method and apparatus
- Patent number 6,024,888
- Issue date Feb 15, 2000
- NEC Corporation
- Hirohito Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
HF vapor selective etching method and apparatus
- Patent number 5,658,417
- Issue date Aug 19, 1997
- NEC Corporation
- Hirohito Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Load lock chamber for vertical type heat treatment apparatus
- Patent number 5,571,330
- Issue date Nov 5, 1996
- ASM Japan K.K.
- Mitsusuke Kyogoku
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat treatment apparatus
- Patent number 5,509,967
- Issue date Apr 23, 1996
- ASM Japan K.K.
- Mitsusuke Kyogoku
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal treatment apparatus
- Patent number 5,484,483
- Issue date Jan 16, 1996
- ASM Japan, K.K.
- Mitsusuke Kyogoku
- C30 - CRYSTAL GROWTH