Mitsuteru Yano

Person

Koshi-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus, state determination method and comp...
- Patent number 11,920,240
- Issue date Mar 5, 2024
- Tokyo Electron Limited
- Ryo Araki
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Transfer apparatus and transfer method
- Patent number 8,707,805
- Issue date Apr 29, 2014
- Tokyo Electron Limited
- Junnosuke Maki
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Temperature control method of heat processing plate, computer stora...
- Patent number 8,698,052
- Issue date Apr 15, 2014
- Tokyo Electron Limited
- Masahide Tadokoro
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate transfer apparatus and substrate treatment system
- Patent number 8,403,601
- Issue date Mar 26, 2013
- Tokyo Electron Limited
- Mitsuteru Yano
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Temperature control method of heat processing plate, computer stora...
- Patent number 8,242,417
- Issue date Aug 14, 2012
- Tokyo Electron Limited
- Masahide Tadokoro
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate processing apparatus
- Patent number 6,332,724
- Issue date Dec 25, 2001
- Tokyo Electron Limited
- Mitsuteru Yano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
STATE DETERMINATION METHOD AND COMPUTER-READABLE RECORDING MEDIUM
- Publication number 20240175131
- Publication date May 30, 2024
- TOKYO ELECTRON LIMITED
- Ryo Araki
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE TRANSFER APPARATUS, STATE DETERMINATION METHOD, AND COMPU...
- Publication number 20220310438
- Publication date Sep 29, 2022
- TOKYO ELECTRON LIMITED
- Ryo ARAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, STATE DETERMINATION METHOD AND COMP...
- Publication number 20220112601
- Publication date Apr 14, 2022
- TOKYO ELECTRON LIMITED
- Ryo Araki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TRANSFER APPARATUS AND TRANSFER METHOD
- Publication number 20130166064
- Publication date Jun 27, 2013
- TOKYO ELECTRON LIMITED
- Junnosuke Maki
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
TEMPERATURE CONTROL METHOD OF HEAT PROCESSING PLATE, COMPUTER STORA...
- Publication number 20120279955
- Publication date Nov 8, 2012
- TOKYO ELECTRON LIMITED
- Masahide TADOKORO
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
TEMPERATURE CONTROL METHOD OF HEAT PROCESSING PLATE, COMPUTER STORA...
- Publication number 20070272680
- Publication date Nov 29, 2007
- TOKYO ELECTRON LIMITED
- Masahide TADOKORO
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Mitsuteru Yano

Person

Patents Grantslast 30 patents

Substrate processing apparatus, state determination method and comp...

Transfer apparatus and transfer method

Temperature control method of heat processing plate, computer stora...

Substrate transfer apparatus and substrate treatment system

Temperature control method of heat processing plate, computer stora...

Substrate processing apparatus

Patents Applicationslast 30 patents

STATE DETERMINATION METHOD AND COMPUTER-READABLE RECORDING MEDIUM

SUBSTRATE TRANSFER APPARATUS, STATE DETERMINATION METHOD, AND COMPU...

SUBSTRATE PROCESSING APPARATUS, STATE DETERMINATION METHOD AND COMP...

TRANSFER APPARATUS AND TRANSFER METHOD

TEMPERATURE CONTROL METHOD OF HEAT PROCESSING PLATE, COMPUTER STORA...

TEMPERATURE CONTROL METHOD OF HEAT PROCESSING PLATE, COMPUTER STORA...