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Mitsuya Sato

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Patents Grantslast 30 patents

  • Information Patent Grant

    Position detector and exposure apparatus
    • Patent number 8,278,616
    • Issue date Oct 2, 2012
    • Canon Kabushiki Kaisha
    • Mitsuya Sato
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Planar motor and stage using the same
    • Patent number 7,898,119
    • Issue date Mar 1, 2011
    • Canon Kabushiki Kaisha
    • Mitsuya Sato
    • H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
  • Information Patent Grant

    Planar pulse motor, exposure apparatus, and device manufacturing me...
    • Patent number 7,772,727
    • Issue date Aug 10, 2010
    • Canon Kabushiki Kaisha
    • Mitsuya Sato
    • H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
  • Information Patent Grant

    Exposure apparatus
    • Patent number 7,551,264
    • Issue date Jun 23, 2009
    • Canon Kabushiki Kaisha
    • Mitsuya Sato
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Exposure apparatus
    • Patent number 7,245,349
    • Issue date Jul 17, 2007
    • Canon Kabushiki Kaisha
    • Mitsuya Sato
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Information storage output system and information storage output se...
    • Patent number 7,228,339
    • Issue date Jun 5, 2007
    • Toshiba Tec Kabushiki Kaisha
    • Hiroshi Yamamoto
    • G06 - COMPUTING CALCULATING COUNTING
  • Information Patent Grant

    Exposure apparatus
    • Patent number 7,079,222
    • Issue date Jul 18, 2006
    • Canon Kabushiki Kaisha
    • Mitsuya Sato
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Exposure apparatus
    • Patent number 7,050,153
    • Issue date May 23, 2006
    • Canon Kabushiki Kaisha
    • Mitsuya Sato
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Exposure apparatus
    • Patent number 7,009,683
    • Issue date Mar 7, 2006
    • Canon Kabushiki Kaisha
    • Mitsuya Sato
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Exposure apparatus and exposure method
    • Patent number 6,888,618
    • Issue date May 3, 2005
    • Canon Kabushiki Kaisha
    • Mitsuya Sato
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Light source, light source generation control method, exposure appa...
    • Patent number 6,862,079
    • Issue date Mar 1, 2005
    • Canon Kabushiki Kaisha
    • Mitsuya Sato
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Exposure apparatus and method, device manufacturing method, and dis...
    • Patent number 6,771,353
    • Issue date Aug 3, 2004
    • Canon Kabushiki Kaisha
    • Mitsuya Sato
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Exposure apparatus and method, device manufacturing method, and dis...
    • Patent number 6,369,876
    • Issue date Apr 9, 2002
    • Canon Kabushiki Kaisha
    • Mitsuya Sato
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Interlocking apparatus
    • Patent number 6,166,505
    • Issue date Dec 26, 2000
    • Canon Kabushiki Kaisha
    • Mitsuya Sato
    • B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
  • Information Patent Grant

    Scan type exposure apparatus and method having a reference plate wi...
    • Patent number 5,753,926
    • Issue date May 19, 1998
    • Canon Kabushiki Kaisha
    • Mitsuya Sato
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Scanning type exposure apparatus and method and device manufacturin...
    • Patent number 5,608,492
    • Issue date Mar 4, 1997
    • Canon Kabushiki Kaisha
    • Mitsuya Sato
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Alignment method in a wafer prober
    • Patent number 4,934,064
    • Issue date Jun 19, 1990
    • Canon Kabushiki Kaisha
    • Nobuhito Yamaguchi
    • G01 - MEASURING TESTING
  • Information Patent Grant

    Wafer prober
    • Patent number 4,929,893
    • Issue date May 29, 1990
    • Canon Kabushiki Kaisha
    • Mitsuya Sato
    • G01 - MEASURING TESTING
  • Information Patent Grant

    Alignment method
    • Patent number 4,870,288
    • Issue date Sep 26, 1989
    • Canon Kabushiki Kaisha
    • Yuji Abuku
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Wafer prober
    • Patent number 4,864,227
    • Issue date Sep 5, 1989
    • Canon Kabushiki Kaisha
    • Mitsuya Sato
    • G01 - MEASURING TESTING
  • Information Patent Grant

    Wafer handling apparatus and method
    • Patent number 4,789,294
    • Issue date Dec 6, 1988
    • Canon Kabushiki Kaisha
    • Mitsuya Sato
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Wafer prober and a probe card to be used therewith
    • Patent number 4,755,747
    • Issue date Jul 5, 1988
    • Canon Kabushiki Kaisha
    • Mitsuya Sato
    • G01 - MEASURING TESTING
  • Information Patent Grant

    Wafer chuck
    • Patent number 4,747,608
    • Issue date May 31, 1988
    • Canon Kabushiki Kaisha
    • Mitsuya Sato
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Wafer prober
    • Patent number 4,677,474
    • Issue date Jun 30, 1987
    • Canon Kabushiki Kaisha
    • Mitsuya Sato
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Alignment apparatus
    • Patent number 4,659,227
    • Issue date Apr 21, 1987
    • Canon Kabushiki Kaisha
    • Mitsuya Sato
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Method of and apparatus for controlling a fluid bearing
    • Patent number 4,569,562
    • Issue date Feb 11, 1986
    • Canon Kabushiki Kaisha
    • Mitsuya Sato
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Grant

    Projection exposure apparatus
    • Patent number 4,496,239
    • Issue date Jan 29, 1985
    • Canon Kabushiki Kaisha
    • Junji Isohata
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents