Mitsuya Utsuno

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of forming structures using a neutral beam
- Patent number 12,129,548
- Issue date Oct 29, 2024
- ASM IP Holding B.V.
- Tomohiro Kubota
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming high aspect ratio features
- Patent number 12,125,700
- Issue date Oct 22, 2024
- ASM IP Holding B.V.
- Mitsuya Utsuno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming structures using a neutral beam
- Patent number 11,643,724
- Issue date May 9, 2023
- ASM IP Holding B.V.
- Tomohiro Kubota
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for depositing silicon-free carbon-containing film as gap-fi...
- Patent number 11,646,197
- Issue date May 9, 2023
- ASM IP Holding B.V.
- Timothee Julien Vincent Blanquart
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of depositing carbon-containing material on a surface of a s...
- Patent number 11,626,316
- Issue date Apr 11, 2023
- ASM IP Holding B.V.
- Mitsuya Utsuno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for etching a carbon-containing feature
- Patent number 10,811,256
- Issue date Oct 20, 2020
- ASM IP Holding B.V.
- Mitsuya Utsuno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for depositing silicon-free carbon-containing film as gap-fi...
- Patent number 10,755,922
- Issue date Aug 25, 2020
- ASM IP Holding B.V.
- Timothee Julien Vincent Blanquart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF FORMING STRUCTURES USING A NEUTRAL BEAM, STRUCTURES FORME...
- Publication number 20230250531
- Publication date Aug 10, 2023
- ASM IP HOLDING B.V.
- Tomohiro Kubota
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING HIGH ASPECT RATIO FEATURES
- Publication number 20210225642
- Publication date Jul 22, 2021
- ASM IP HOLDING B.V.
- Mitsuya Utsuno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF DEPOSITING CARBON-CONTAINING MATERIAL ON A SURFACE OF A S...
- Publication number 20210151348
- Publication date May 20, 2021
- ASM IP HOLDING B.V.
- Mitsuya Utsuno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING STRUCTURES USING A NEUTRAL BEAM, STRUCTURES FORME...
- Publication number 20210017648
- Publication date Jan 21, 2021
- ASM IP HOLDING B.V.
- Tomohiro Kubota
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR DEPOSITING SILICON-FREE CARBON-CONTAINING FILM AS GAP-FI...
- Publication number 20200365391
- Publication date Nov 19, 2020
- ASM IP HOLDING B.V.
- Timothee Julien Vincent Blanquart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR ETCHING A CARBON-CONTAINING FEATURE
- Publication number 20200118811
- Publication date Apr 16, 2020
- ASM IP HOLDING B.V.
- Mitsuya Utsuno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR DEPOSITING SILICON-FREE CARBON-CONTAINING FILM AS GAP-FI...
- Publication number 20200013612
- Publication date Jan 9, 2020
- ASM IP HOLDING B.V.
- Timothee Julien Vincent Blanquart
- H01 - BASIC ELECTRIC ELEMENTS

Mitsuya Utsuno

Person

Patents Grantslast 30 patents

Method of forming structures using a neutral beam

Method of forming high aspect ratio features

Method of forming structures using a neutral beam

Method for depositing silicon-free carbon-containing film as gap-fi...

Method of depositing carbon-containing material on a surface of a s...

Method for etching a carbon-containing feature

Method for depositing silicon-free carbon-containing film as gap-fi...

Patents Applicationslast 30 patents

METHOD OF FORMING STRUCTURES USING A NEUTRAL BEAM, STRUCTURES FORME...

METHOD OF FORMING HIGH ASPECT RATIO FEATURES

METHOD OF DEPOSITING CARBON-CONTAINING MATERIAL ON A SURFACE OF A S...

METHOD OF FORMING STRUCTURES USING A NEUTRAL BEAM, STRUCTURES FORME...

METHOD FOR DEPOSITING SILICON-FREE CARBON-CONTAINING FILM AS GAP-FI...

METHOD FOR ETCHING A CARBON-CONTAINING FEATURE

METHOD FOR DEPOSITING SILICON-FREE CARBON-CONTAINING FILM AS GAP-FI...