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Electron beam apparatus
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Patent number 6,740,888
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Issue date May 25, 2004
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SII NanoTechnology Inc.
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Mitsuyoshi Sato
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H01 - BASIC ELECTRIC ELEMENTS
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Electron beam device
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Patent number 6,037,589
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Issue date Mar 14, 2000
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Seiko Instruments Inc.
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Akira Yonezawa
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H01 - BASIC ELECTRIC ELEMENTS
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Mask-repairing device
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Patent number 4,930,439
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Issue date Jun 5, 1990
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Seiko Instruments Inc.
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Mitsuyoshi Sato
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Method of correcting a pattern film
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Patent number 4,902,530
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Issue date Feb 20, 1990
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Seiko Instruments Inc.
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Anto Yasaka
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Macroanalyzer system
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Patent number 4,467,199
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Issue date Aug 21, 1984
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Seiko Instruments & Electronics Ltd.
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Mitsuyoshi Sato
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G01 - MEASURING TESTING
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