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Mituyoshi Koizumi
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Yokohama, JP
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last 30 patents
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Patent Grant
Method and apparatus for projection type mask alignment
Patent number
4,362,389
Issue date
Dec 7, 1982
Hitachi, Ltd.
Mituyoshi Koizumi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Method and apparatus for reduction-projection type mask alignment
Patent number
4,153,371
Issue date
May 8, 1979
Hitachi, Ltd.
Mituyoshi Koizumi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY