Miwa IGARASHI

Person

Oyama, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Laser apparatus and electronic device manufacturing method
- Patent number 11,978,997
- Issue date May 7, 2024
- Gigaphoton Inc.
- Hirotaka Miyamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Line narrowing module, gas laser apparatus, and electronic device m...
- Patent number 11,411,364
- Issue date Aug 9, 2022
- Gigaphoton Inc.
- Miwa Igarashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Line narrowing module
- Patent number 10,916,910
- Issue date Feb 9, 2021
- Gigaphoton Inc.
- Shinichi Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Extreme ultraviolet light generation apparatus
- Patent number 9,894,743
- Issue date Feb 13, 2018
- Gigaphoton Inc.
- Yukio Watanabe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mirror device
- Patent number 9,882,334
- Issue date Jan 30, 2018
- Gigaphoton Inc.
- Toru Suzuki
- G02 - OPTICS
Information Patent Grant
Extreme ultraviolet light generation apparatus
- Patent number 9,301,379
- Issue date Mar 29, 2016
- Gigaphoton Inc.
- Yukio Watanabe
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet light generation apparatus
- Patent number 9,198,273
- Issue date Nov 24, 2015
- Gigaphoton Inc.
- Miwa Igarashi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet light source apparatus
- Patent number 9,179,534
- Issue date Nov 3, 2015
- Gigaphoton Inc.
- Yukio Watanabe
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet light source apparatus
- Patent number 8,669,542
- Issue date Mar 11, 2014
- Gigaphoton Inc.
- Yukio Watanabe
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
LASER APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD
- Publication number 20210367396
- Publication date Nov 25, 2021
- Gigaphoton Inc.
- Hirotaka MIYAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS LASER APPARATUS, AND ELECTRONIC DEVICE MANUFACTURING METHOD
- Publication number 20210367390
- Publication date Nov 25, 2021
- Gigaphoton Inc.
- Daisuke TEI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LINE NARROWING MODULE, GAS LASER APPARATUS, AND ELECTRONIC DEVICE M...
- Publication number 20210336407
- Publication date Oct 28, 2021
- Gigaphoton Inc.
- Miwa IGARASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LINE NARROWING MODULE
- Publication number 20200014168
- Publication date Jan 9, 2020
- Gigaphoton Inc.
- Shinichi MATSUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NARROW BAND LASER APPARATUS AND METHOD FOR POSITIONING LINE NARROW...
- Publication number 20170205631
- Publication date Jul 20, 2017
- Gigaphoton Inc.
- Yoshinobu WATABE
- G02 - OPTICS
Information Patent Application
MIRROR DEVICE
- Publication number 20160315439
- Publication date Oct 27, 2016
- Gigaphoton Inc.
- Toru SUZUKI
- G02 - OPTICS
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS
- Publication number 20160192469
- Publication date Jun 30, 2016
- GIGAPHOTON INC.
- Yukio WATANABE
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS
- Publication number 20140332700
- Publication date Nov 13, 2014
- Miwa IGARASHI
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS
- Publication number 20140131587
- Publication date May 15, 2014
- GIGAPHOTON INC.
- Yukio WATANABE
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS
- Publication number 20130105713
- Publication date May 2, 2013
- GIGAPHOTON INC.
- Yukio Watanabe
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
OPTICAL SYSTEM AND EXTREME ULTRAVIOLET (EUV) LIGHT GENERATION SYSTE...
- Publication number 20130037693
- Publication date Feb 14, 2013
- GIGAPHOTON INC.
- Masato Moriya
- G02 - OPTICS
Information Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS
- Publication number 20100288937
- Publication date Nov 18, 2010
- Yukio WATANABE
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Miwa IGARASHI

Person

Patents Grantslast 30 patents

Laser apparatus and electronic device manufacturing method

Line narrowing module, gas laser apparatus, and electronic device m...

Line narrowing module

Extreme ultraviolet light generation apparatus

Mirror device

Extreme ultraviolet light generation apparatus

Extreme ultraviolet light generation apparatus

Extreme ultraviolet light source apparatus

Extreme ultraviolet light source apparatus

Patents Applicationslast 30 patents

LASER APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD

GAS LASER APPARATUS, AND ELECTRONIC DEVICE MANUFACTURING METHOD

LINE NARROWING MODULE, GAS LASER APPARATUS, AND ELECTRONIC DEVICE M...

LINE NARROWING MODULE

NARROW BAND LASER APPARATUS AND METHOD FOR POSITIONING LINE NARROW...

MIRROR DEVICE

EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS

EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS

EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS

EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS

OPTICAL SYSTEM AND EXTREME ULTRAVIOLET (EUV) LIGHT GENERATION SYSTE...

EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS