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Miwa Shimizu

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Patents Grantslast 30 patents

  • Information Patent Grant

    Annealing apparatus
    • Patent number 8,246,900
    • Issue date Aug 21, 2012
    • Tokyo Electron Limited
    • Shigeru Kasai
    • Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...

Patents Applicationslast 30 patents

  • Information Patent Application

    ANNEALING APPARATUS
    • Publication number 20120279944
    • Publication date Nov 8, 2012
    • TOKYO ELECTRON LIMITED
    • Shigeru KASAI
    • Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
  • Information Patent Application

    ANNEALING APPARATUS
    • Publication number 20100038833
    • Publication date Feb 18, 2010
    • Tokyo Electron Limited
    • Shigeru Kasai
    • Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...