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Miwako Ando
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Utsunomiya-shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Exposure apparatus and device manufacturing method
Patent number
8,411,250
Issue date
Apr 2, 2013
Canon Kabushiki Kaisha
Miwako Ando
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus and device manufacturing method
Patent number
7,602,504
Issue date
Oct 13, 2009
Canon Kabushiki Kaisha
Miwako Ando
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20090002665
Publication date
Jan 1, 2009
Canon Kabushiki Kaisha
Miwako Ando
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20080259349
Publication date
Oct 23, 2008
Canon Kabushiki Kaisha
Miwako Ando
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Exposure apparatus having interferometer and device manufacturing m...
Publication number
20060119821
Publication date
Jun 8, 2006
Miwako Ando
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY