Miyoko Noguchi

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Projection exposure apparatus and device manufacturing method inclu...
- Patent number 6,473,160
- Issue date Oct 29, 2002
- Canon Kabushiki Kaisha
- Akiyoshi Suzuki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device manufacturing method including changi...
- Patent number 6,271,909
- Issue date Aug 7, 2001
- Canon Kabushiki Kaisha
- Akiyoshi Suzuki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus including an illumination optical sys...
- Patent number 6,128,068
- Issue date Oct 3, 2000
- Canon Kabushiki Kaisha
- Akiyoshi Suzuki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography process
- Patent number 6,107,007
- Issue date Aug 22, 2000
- Canon Kabushiki Kaisha
- Tadahiro Ohmi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imaging method for manufacture of microdevices
- Patent number 6,084,655
- Issue date Jul 4, 2000
- Canon Kabushiki Kaisha
- Akiyoshi Suzuki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Image farming and microdevice manufacturing method and exposure app...
- Patent number 5,673,102
- Issue date Sep 30, 1997
- Canon Kabushiki Kaisha
- Akiyoshi Suzuki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Semiconductor device manufacturing method and projection exposure a...
- Patent number 5,587,834
- Issue date Dec 24, 1996
- Canon Kabushiki Kaisha
- Miyoko Noguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus and semiconductor device manufacturin...
- Patent number 5,436,692
- Issue date Jul 25, 1995
- Canon Kabushiki Kaisha
- Miyoko Noguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus and semiconductor device manufacturin...
- Patent number 5,424,803
- Issue date Jun 13, 1995
- Canon Kabushiki Kaisha
- Miyoko Noguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imaging method for manufacture of microdevices
- Patent number 5,305,054
- Issue date Apr 19, 1994
- Canon Kabushiki Kaisha
- Akiyoshi Suzuki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Imaging method for manufacture of microdevices
- Publication number 20010015797
- Publication date Aug 23, 2001
- Akiyoshi Suzuki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Projection exposure apparatus and device manufacturing method inclu...
- Publication number 20010007495
- Publication date Jul 12, 2001
- Akiyoshi Suzuki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Miyoko Noguchi

Person

Patents Grantslast 30 patents

Projection exposure apparatus and device manufacturing method inclu...

Exposure apparatus and device manufacturing method including changi...

Projection exposure apparatus including an illumination optical sys...

Lithography process

Imaging method for manufacture of microdevices

Image farming and microdevice manufacturing method and exposure app...

Semiconductor device manufacturing method and projection exposure a...

Projection exposure apparatus and semiconductor device manufacturin...

Projection exposure apparatus and semiconductor device manufacturin...

Imaging method for manufacture of microdevices

Patents Applicationslast 30 patents

Imaging method for manufacture of microdevices

Projection exposure apparatus and device manufacturing method inclu...