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Mizuki Watanabe
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Nagano-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Electrostatic chuck and substrate fixing device
Patent number
12,198,968
Issue date
Jan 14, 2025
Shinko Electric Industries Co., Ltd.
Kentaro Kobayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatic chuck and substrate holding device
Patent number
11,942,350
Issue date
Mar 26, 2024
Shinko Electric Industries Co., Ltd.
Masakuni Miyazawa
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
ELECTROSTATIC CHUCK AND SUBSTRATE FIXING DEVICE
Publication number
20230030510
Publication date
Feb 2, 2023
Shinko Electric Industries Co., Ltd.
Kentaro Kobayashi
C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information
Patent Application
ELECTROSTATIC CHUCK AND SUBSTRATE HOLDING DEVICE
Publication number
20230032111
Publication date
Feb 2, 2023
Shinko Electric Industries Co., Ltd.
Masakuni MIYAZAWA
H01 - BASIC ELECTRIC ELEMENTS