Mizuna SUGANUMA

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Yokohama, JP

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Patents Grantslast 30 patents

Information Patent Grant
Charged particle beam lithography apparatus and charged particle be...
- Patent number 10,032,603
- Issue date Jul 24, 2018
- NuFlare Technology, Inc.
- Noriaki Nakayamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam writing method, and charged particle beam wri...
- Patent number 9,852,885
- Issue date Dec 26, 2017
- NuFlare Technology, Inc.
- Mizuna Suganuma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam writing apparatus, and charged particle beam...
- Patent number 9,484,185
- Issue date Nov 1, 2016
- NuFlare Technology, Inc.
- Mizuna Suganuma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam writing apparatus and method for acquiring do...
- Patent number 9,224,578
- Issue date Dec 29, 2015
- NuFlare Technology, Inc.
- Noriaki Nakayamada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
CHARGED PARTICLE BEAM WRITING METHOD, AND CHARGED PARTICLE BEAM WRI...
- Publication number 20170278672
- Publication date Sep 28, 2017
- NuFlare Technology, Inc.
- Mizuna SUGANUMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM LITHOGRAPHY APPARATUS AND CHARGED PARTICLE BE...
- Publication number 20170069460
- Publication date Mar 9, 2017
- NuFlare Technology, Inc.
- Noriaki NAKAYAMADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS, AND CHARGED PARTICLE BEAM...
- Publication number 20160148785
- Publication date May 26, 2016
- NuFlare Technology, Inc.
- Mizuna SUGANUMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND METHOD FOR ACQUIRING DO...
- Publication number 20140291553
- Publication date Oct 2, 2014
- NuFlare Technology, Inc.
- Noriaki NAKAYAMADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM D...
- Publication number 20140138527
- Publication date May 22, 2014
- NuFlare Technology, Inc.
- Yasuo KATO
- B82 - NANO-TECHNOLOGY