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Unconsumed precursor monitoring
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Patent number 11,929,270
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Issue date Mar 12, 2024
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Mohamed Buhary Rinzan
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Unconsumed precursor monitoring
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Patent number 11,335,575
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Issue date May 17, 2022
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Inficon, Inc.
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Mohamed Buhary Rinzan
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Monitoring thin film deposition
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Patent number 10,704,150
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Issue date Jul 7, 2020
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Inficon, Inc.
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Mohamed Buhary Rinzan
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...