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last 30 patents
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Patent Grant
Pattern height metrology using an e-beam system
Patent number
12,278,086
Issue date
Apr 15, 2025
Imec VZW
Gian Francesco Lorusso
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Pattern Height Metrology Using an E-Beam System
Publication number
20220392742
Publication date
Dec 8, 2022
IMEC vzw
Gian Francesco Lorusso
H01 - BASIC ELECTRIC ELEMENTS