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Mohammad Awad
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Aalen, DE
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last 30 patents
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Patent Grant
Modulation device, control device, optical system, lithography syst...
Patent number
11,901,948
Issue date
Feb 13, 2024
Carl Zeiss SMT GmbH
Cornelius Richt
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Grant
Method and device for modifying imaging properties of an optical sy...
Patent number
10,649,343
Issue date
May 12, 2020
Carl Zeiss SMT GmbH
Jochen Knopf
G06 - COMPUTING CALCULATING COUNTING
Patents Applications
last 30 patents
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Patent Application
METHOD AND DEVICE FOR MEASURING ACTUATORS IN A PROJECTION EXPOSURE...
Publication number
20230228798
Publication date
Jul 20, 2023
Carl Zeiss SMT GMBH
Markus Raab
G01 - MEASURING TESTING
Information
Patent Application
MIRROR, IN PARTICULAR FOR MICROLITHOGRAPHY
Publication number
20230088791
Publication date
Mar 23, 2023
Carl Zeiss SMT GMBH
Jan HORN
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
DRIVE DEVICE, OPTICAL SYSTEM AND LITHOGRAPHY APPARATUS
Publication number
20230047921
Publication date
Feb 16, 2023
Carl Zeiss SMT GMBH
Michel Aliman
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
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Patent Application
MODULATION DEVICE, CONTROL DEVICE, OPTICAL SYSTEM, LITHOGRAPHY SYST...
Publication number
20220149950
Publication date
May 12, 2022
Carl Zeiss SMT GMBH
Cornelius Richt
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Application
METHOD AND DEVICE FOR MODIFYING IMAGING PROPERTIES OF AN OPTICAL SY...
Publication number
20190302623
Publication date
Oct 3, 2019
Carl Zeiss SMT GMBH
Jochen Knopf
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY