Mohan Ananth

Person

  • Boxborough, MA, US

Patents Grantslast 30 patents

  • Information Patent Grant

    Reducing particle implantation

    • Patent number 8,907,277
    • Issue date Dec 9, 2014
    • Carl Zeiss Microscopy, LLC
    • Rainer Knippelmeyer
    • G01 - MEASURING TESTING

Patents Applicationslast 30 patents

  • Information Patent Application

    REDUCING PARTICLE IMPLANTATION

    • Publication number 20110049364
    • Publication date Mar 3, 2011
    • Carl Zeiss SMT Inc.
    • Rainer Knippelmeyer
    • G01 - MEASURING TESTING