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Mohan Ananth
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Boxborough, MA, US
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last 30 patents
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Patent Grant
Reducing particle implantation
Patent number
8,907,277
Issue date
Dec 9, 2014
Carl Zeiss Microscopy, LLC
Rainer Knippelmeyer
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
REDUCING PARTICLE IMPLANTATION
Publication number
20110049364
Publication date
Mar 3, 2011
Carl Zeiss SMT Inc.
Rainer Knippelmeyer
G01 - MEASURING TESTING