Mohan Mahadevan

Person

Santa Clara, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Semiconductor inspection and metrology systems for distributing job...
- Patent number 11,237,872
- Issue date Feb 1, 2022
- KLA-Tencor Corporation
- Ajay Gupta
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Unified neural network for defect detection and classification
- Patent number 10,607,119
- Issue date Mar 31, 2020
- KLA-Tencor Corp.
- Li He
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Systems and methods for detecting defects on a wafer
- Patent number 10,605,744
- Issue date Mar 31, 2020
- KLA-Tencor Corp.
- Lu Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and methods for combined brightfield, darkfield, and phot...
- Patent number 10,533,954
- Issue date Jan 14, 2020
- KLA-Tencor Corporation
- Lena Nicolaides
- G01 - MEASURING TESTING
Information Patent Grant
Contour based defect detection
- Patent number 10,395,362
- Issue date Aug 27, 2019
- KLA-Tencor Corp.
- Ajay Gupta
- G01 - MEASURING TESTING
Information Patent Grant
Accelerating semiconductor-related computations using learning base...
- Patent number 10,360,477
- Issue date Jul 23, 2019
- KLA-Tencor Corp.
- Kris Bhaskar
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Wafer and lot based hierarchical method combining customized metric...
- Patent number 10,290,088
- Issue date May 14, 2019
- KLA-Tencor Corporation
- Himanshu Vajaria
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Systems and methods for detecting defects on a wafer
- Patent number 9,880,107
- Issue date Jan 30, 2018
- KLA-Tencor Corp.
- Lu Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and methods for combined brightfield, darkfield, and phot...
- Patent number 9,772,297
- Issue date Sep 26, 2017
- KLA-Tencor Corporation
- Lena Nicolaides
- G01 - MEASURING TESTING
Information Patent Grant
Automated inline inspection and metrology using shadow-gram images
- Patent number 9,734,568
- Issue date Aug 15, 2017
- KLA-Tencor Corporation
- Himanshu Vajaria
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
In-line wafer edge inspection, wafer pre-alignment, and wafer cleaning
- Patent number 9,645,097
- Issue date May 9, 2017
- KLA-Tencor Corporation
- Lena Nicolaides
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Automated inline inspection of wafer edge strain profiles using rap...
- Patent number 9,640,449
- Issue date May 2, 2017
- KLA-Tencor Corporation
- Timothy Goodwin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Automated image-based process monitoring and control
- Patent number 9,569,834
- Issue date Feb 14, 2017
- KLA-Tencor Corporation
- Himanshu Vajaria
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Data perturbation for wafer inspection or metrology setup using a m...
- Patent number 9,360,863
- Issue date Jun 7, 2016
- KLA-Tencor Corp.
- Govind Thattaisundaram
- G05 - CONTROLLING REGULATING
Information Patent Grant
Automated inspection scenario generation
- Patent number 9,053,390
- Issue date Jun 9, 2015
- KLA-Tencor Corporation
- Mohan Mahadevan
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Systems and methods for detecting defects on a wafer
- Patent number 8,467,047
- Issue date Jun 18, 2013
- KLA-Tencor Corp.
- Lu Chen
- G01 - MEASURING TESTING
Information Patent Grant
Systems and methods for detecting defects on a wafer
- Patent number 8,223,327
- Issue date Jul 17, 2012
- KLA-Tencor Corp.
- Lu Chen
- G01 - MEASURING TESTING
Information Patent Grant
Systems and methods for creating persistent data for a wafer and fo...
- Patent number 8,126,255
- Issue date Feb 28, 2012
- KLA-Tencor Corp.
- Kris Bhaskar
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
UNIFIED NEURAL NETWORK FOR DEFECT DETECTION AND CLASSIFICATION
- Publication number 20190073568
- Publication date Mar 7, 2019
- KLA-Tencor Corporation
- Li He
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
GENERATING HIGH RESOLUTION IMAGES FROM LOW RESOLUTION IMAGES FOR SE...
- Publication number 20190005629
- Publication date Jan 3, 2019
- KLA-Tencor Corporation
- Saurabh Sharma
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Scalable and Flexible Job Distribution Architecture for a Hybrid Pr...
- Publication number 20180341525
- Publication date Nov 29, 2018
- KLA-Tencor Corporation
- Ajay Gupta
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
LEARNING BASED APPROACH FOR ALIGNING IMAGES ACQUIRED WITH DIFFERENT...
- Publication number 20180330511
- Publication date Nov 15, 2018
- KLA-Tencor Corporation
- Thanh Huy Ha
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CONTOUR BASED DEFECT DETECTION
- Publication number 20180293721
- Publication date Oct 11, 2018
- KLA-Tencor Corporation
- Ajay Gupta
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SYSTEMS AND METHODS FOR DETECTING DEFECTS ON A WAFER
- Publication number 20180202943
- Publication date Jul 19, 2018
- KLA-Tencor Corporation
- Lu Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHODS FOR COMBINED BRIGHTFIELD, DARKFIELD, AND PHOT...
- Publication number 20180003648
- Publication date Jan 4, 2018
- KLA-Tencor Corporation
- Lena Nicolaides
- G01 - MEASURING TESTING
Information Patent Application
ACCELERATING SEMICONDUCTOR-RELATED COMPUTATIONS USING LEARNING BASE...
- Publication number 20170200260
- Publication date Jul 13, 2017
- KLA-Tencor Corporation
- Kris Bhaskar
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
ACCELERATED TRAINING OF A MACHINE LEARNING BASED MODEL FOR SEMICOND...
- Publication number 20170193400
- Publication date Jul 6, 2017
- KLA-Tencor Corporation
- Kris Bhaskar
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
AUTOMATED IMAGE-BASED PROCESS MONITORING AND CONTROL
- Publication number 20160371826
- Publication date Dec 22, 2016
- KLA-Tencor Corporation
- Himanshu VAJARIA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
IN-LINE WAFER EDGE INSPECTION, WAFER PRE-ALIGNMENT, AND WAFER CLEANING
- Publication number 20150370175
- Publication date Dec 24, 2015
- KLA-Tencor Corporation
- Lena Nicolaides
- G01 - MEASURING TESTING
Information Patent Application
Automated Inline Inspection of Wafer Edge Strain Profiles Using Rap...
- Publication number 20150371910
- Publication date Dec 24, 2015
- KLA-Tencor Corporation
- Timothy Goodwin
- G01 - MEASURING TESTING
Information Patent Application
AUTOMATED INLINE INSPECTION AND METROLOGY USING SHADOW-GRAM IMAGES
- Publication number 20150243018
- Publication date Aug 27, 2015
- KLA-Tencor Corporation
- Himanshu VAJARIA
- G01 - MEASURING TESTING
Information Patent Application
Wafer and Lot Based Hierarchical Method Combining Customized Metric...
- Publication number 20150234379
- Publication date Aug 20, 2015
- KLA-Tencor Corporation
- Himanshu Vajaria
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHODS FOR COMBINED BRIGHTFIELD, DARKFIELD, AND PHOT...
- Publication number 20150226676
- Publication date Aug 13, 2015
- KLA-Tencor Corporation
- Lena Nicolaides
- G01 - MEASURING TESTING
Information Patent Application
Automated Inspection Scenario Generation
- Publication number 20140050389
- Publication date Feb 20, 2014
- KLA-Tencor Corporation
- Mohan Mahadevan
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Systems and Methods for Detecting Defects on a Wafer
- Publication number 20130250287
- Publication date Sep 26, 2013
- KLA-Tencor Corporation
- Lu Chen
- G01 - MEASURING TESTING
Information Patent Application
Systems and Methods for Detecting Defects on a Wafer
- Publication number 20120268735
- Publication date Oct 25, 2012
- KLA-Tencor Corporation
- Lu Chen
- G01 - MEASURING TESTING
Information Patent Application
Data Perturbation for Wafer Inspection or Metrology Setup
- Publication number 20120116733
- Publication date May 10, 2012
- KLA-Tencor Corporation
- Govind Thattaisundaram
- G05 - CONTROLLING REGULATING
Information Patent Application
SYSTEMS AND METHODS FOR DETECTING DEFECTS ON A WAFER
- Publication number 20100188657
- Publication date Jul 29, 2010
- KLA-Tencor Corporation
- Lu Chen
- G01 - MEASURING TESTING
Information Patent Application
SYSTEMS AND METHODS FOR CREATING PERSISTENT DATA FOR A WAFER AND FO...
- Publication number 20090080759
- Publication date Mar 26, 2009
- KLA-Tencor Corporation
- Kris Bhaskar
- G06 - COMPUTING CALCULATING COUNTING

Mohan Mahadevan

Person

Patents Grantslast 30 patents

Semiconductor inspection and metrology systems for distributing job...

Unified neural network for defect detection and classification

Systems and methods for detecting defects on a wafer

Apparatus and methods for combined brightfield, darkfield, and phot...

Contour based defect detection

Accelerating semiconductor-related computations using learning base...

Wafer and lot based hierarchical method combining customized metric...

Systems and methods for detecting defects on a wafer

Apparatus and methods for combined brightfield, darkfield, and phot...

Automated inline inspection and metrology using shadow-gram images

In-line wafer edge inspection, wafer pre-alignment, and wafer cleaning

Automated inline inspection of wafer edge strain profiles using rap...

Automated image-based process monitoring and control

Data perturbation for wafer inspection or metrology setup using a m...

Automated inspection scenario generation

Systems and methods for detecting defects on a wafer

Systems and methods for detecting defects on a wafer

Systems and methods for creating persistent data for a wafer and fo...

Patents Applicationslast 30 patents

UNIFIED NEURAL NETWORK FOR DEFECT DETECTION AND CLASSIFICATION

GENERATING HIGH RESOLUTION IMAGES FROM LOW RESOLUTION IMAGES FOR SE...

Scalable and Flexible Job Distribution Architecture for a Hybrid Pr...

LEARNING BASED APPROACH FOR ALIGNING IMAGES ACQUIRED WITH DIFFERENT...

CONTOUR BASED DEFECT DETECTION

SYSTEMS AND METHODS FOR DETECTING DEFECTS ON A WAFER

APPARATUS AND METHODS FOR COMBINED BRIGHTFIELD, DARKFIELD, AND PHOT...

ACCELERATING SEMICONDUCTOR-RELATED COMPUTATIONS USING LEARNING BASE...

ACCELERATED TRAINING OF A MACHINE LEARNING BASED MODEL FOR SEMICOND...

AUTOMATED IMAGE-BASED PROCESS MONITORING AND CONTROL

IN-LINE WAFER EDGE INSPECTION, WAFER PRE-ALIGNMENT, AND WAFER CLEANING

Automated Inline Inspection of Wafer Edge Strain Profiles Using Rap...

AUTOMATED INLINE INSPECTION AND METROLOGY USING SHADOW-GRAM IMAGES

Wafer and Lot Based Hierarchical Method Combining Customized Metric...

APPARATUS AND METHODS FOR COMBINED BRIGHTFIELD, DARKFIELD, AND PHOT...

Automated Inspection Scenario Generation

Systems and Methods for Detecting Defects on a Wafer

Systems and Methods for Detecting Defects on a Wafer

Data Perturbation for Wafer Inspection or Metrology Setup

SYSTEMS AND METHODS FOR DETECTING DEFECTS ON A WAFER

SYSTEMS AND METHODS FOR CREATING PERSISTENT DATA FOR A WAFER AND FO...