Mohand Brouri

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Patents Grantslast 30 patents

Information Patent Grant
Atomic layer etching for subtractive metal etch
- Patent number 12,266,542
- Issue date Apr 1, 2025
- Lam Research Corpporation
- Wenbing Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Atomic layer etching and smoothing of refractory metals and other h...
- Patent number 11,450,513
- Issue date Sep 20, 2022
- Lam Research Corporation
- Wenbing Yang
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ATOMIC LAYER ETCHING FOR SUBTRACTIVE METAL ETCH
- Publication number 20250191934
- Publication date Jun 12, 2025
- LAM RESEARCH CORPORATION
- Wenbing YANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ATOMIC LAYER ETCHING FOR SUBTRACTIVE METAL ETCH
- Publication number 20240186150
- Publication date Jun 6, 2024
- LAM RESEARCH CORPORATION
- Wenbing YANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBTRACTIVE COPPER ETCH
- Publication number 20230298869
- Publication date Sep 21, 2023
- LAM RESEARCH CORPORATION
- Wenbing YANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ATOMIC LAYER ETCHING AND SMOOTHING OF REFRACTORY METALS AND OTHER H...
- Publication number 20210005425
- Publication date Jan 7, 2021
- LAM RESEARCH CORPORATION
- Wenbing Yang
- H01 - BASIC ELECTRIC ELEMENTS