Mohith E. Verghese

Person

Phoenix, AZ, US

People

Patents Grantslast 30 patents

Information Patent Grant
Enhancing gapfill performance of dram word line
- Patent number 12,114,488
- Issue date Oct 8, 2024
- Applied Materials, Inc.
- Yong Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low temperature deposition of pure molybdenum films
- Patent number 12,080,558
- Issue date Sep 3, 2024
- Applied Materials, Inc.
- Kunal Bhatnagar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Bottom fed sublimation bed for high saturation efficiency in semico...
- Patent number 12,054,825
- Issue date Aug 6, 2024
- Applied Materials, Inc.
- Carl White
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reactant vaporizer and related systems and methods
- Patent number 11,926,894
- Issue date Mar 12, 2024
- ASM IP Holding B.V.
- Mohith Verghese
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ampoule for a semiconductor manufacturing precursor
- Patent number 11,859,281
- Issue date Jan 2, 2024
- Applied Materials, Inc.
- Carl White
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low temperature deposition of pure molybenum films
- Patent number 11,854,813
- Issue date Dec 26, 2023
- Applied Materials, Inc.
- Kunal Bhatnagar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Solid source sublimator
- Patent number 11,773,486
- Issue date Oct 3, 2023
- ASM IP Holding B.V.
- Eric James Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Bottom fed sublimation bed for high saturation efficiency in semico...
- Patent number 11,773,485
- Issue date Oct 3, 2023
- Applied Materials, Inc.
- David Marquardt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-zone reactor, system including the reactor, and method of usi...
- Patent number 11,742,189
- Issue date Aug 29, 2023
- ASM IP Holding B.V.
- Carl Louis White
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Solid source sublimator
- Patent number 11,634,812
- Issue date Apr 25, 2023
- ASM IP Holding B.V.
- Eric James Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor processing apparatus comprising one or more pyrometer...
- Patent number 11,629,406
- Issue date Apr 18, 2023
- ASM IP Holding B.V.
- Mohith Verghese
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Bottom fed sublimation bed for high saturation efficiency in semico...
- Patent number 11,584,990
- Issue date Feb 21, 2023
- Applied Materials, Inc.
- David Marquardt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ampoule for a semiconductor manufacturing precursor
- Patent number 11,578,406
- Issue date Feb 14, 2023
- Applied Materials, Inc.
- Carl White
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reactant vaporizer and related systems and methods
- Patent number 11,377,732
- Issue date Jul 5, 2022
- ASM IP Holding B.V.
- Mohith Verghese
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Quartz crystal microbalance concentration monitor
- Patent number 11,359,286
- Issue date Jun 14, 2022
- Applied Materials, Inc.
- Jereld Winkler
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reactant vaporizer and related systems and methods
- Patent number 10,876,205
- Issue date Dec 29, 2020
- ASM IP Holding B.V.
- Mohith Verghese
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Tritertbutyl aluminum reactants for vapor deposition
- Patent number 10,875,774
- Issue date Dec 29, 2020
- ASM IP Holding B.V.
- Eric J. Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor processing reactor and components thereof
- Patent number 10,844,486
- Issue date Nov 24, 2020
- ASM IP Holding B.V.
- Eric James Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for thin-film deposition of metal oxides using...
- Patent number 10,804,098
- Issue date Oct 13, 2020
- ASM IP Holding B.V.
- Petri Raisanen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tritertbutyl aluminum reactants for vapor deposition
- Patent number 10,556,799
- Issue date Feb 11, 2020
- ASM IP Holding B.V.
- Eric J. Shero
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Cross-flow reactor and method
- Patent number 10,529,542
- Issue date Jan 7, 2020
- ASM IP Holdings B.V.
- Carl Louis White
- B08 - CLEANING
Information Patent Grant
Semiconductor processing reactor and components thereof
- Patent number 10,480,072
- Issue date Nov 19, 2019
- ASM IP Holding B.V.
- Eric James Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reaction system for growing a thin film
- Patent number 10,468,291
- Issue date Nov 5, 2019
- ASM America, Inc.
- Mohith Verghese
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective etching of reactor surfaces
- Patent number 10,358,599
- Issue date Jul 23, 2019
- ASM America, Inc.
- Srini Raghavan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-zone reactor, system including the reactor, and method of usi...
- Patent number 10,276,355
- Issue date Apr 30, 2019
- ASM IP Holding B.V.
- Carl Louis White
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tritertbutyl aluminum reactants for vapor deposition
- Patent number 10,118,828
- Issue date Nov 6, 2018
- ASM IP Holding B.V.
- Eric J. Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of vapor deposition with multiple vapor sources
- Patent number 9,873,942
- Issue date Jan 23, 2018
- ASM IP Holding B.V.
- Christophe Pomarede
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Precursor delivery system
- Patent number 9,593,416
- Issue date Mar 14, 2017
- ASM America, Inc.
- Kyle Fondurulia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective etching of reactor surfaces
- Patent number 9,481,937
- Issue date Nov 1, 2016
- ASM America, Inc.
- Srini Raghavan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor processing reactor and components thereof
- Patent number 9,394,608
- Issue date Jul 19, 2016
- ASM America, Inc.
- Eric Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
REACTANT VAPORIZER AND RELATED SYSTEMS AND METHODS
- Publication number 20240209501
- Publication date Jun 27, 2024
- ASM IP HOLDING B.V.
- Mohith Verghese
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONFORMAL MOLYBDENUM DEPOSITION
- Publication number 20240060175
- Publication date Feb 22, 2024
- Applied Materials, Inc.
- Srinivas Gandikota
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW TEMPERATURE DEPOSITION OF PURE MOLYBENUM FILMS
- Publication number 20240047215
- Publication date Feb 8, 2024
- Applied Materials, Inc.
- Kunal Bhatnagar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF SELECTIVE DEPOSITION OF MOLYBDENUM
- Publication number 20240035151
- Publication date Feb 1, 2024
- Applied Materials, Inc.
- Rand Haddadin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SOLID SOURCE SUBLIMATOR
- Publication number 20230383402
- Publication date Nov 30, 2023
- ASM IP HOLDING B.V.
- Eric James Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SOLID SOURCE SUBLIMATOR
- Publication number 20230313370
- Publication date Oct 5, 2023
- ASM IP HOLDING B.V.
- Eric James Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESSING APPARATUS AND METHODS FOR MONITORING AND C...
- Publication number 20230243033
- Publication date Aug 3, 2023
- ASM IP HOLDING B.V.
- Mohith Verghese
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SOLID SOURCE SUBLIMATOR
- Publication number 20230183861
- Publication date Jun 15, 2023
- ASM IP HOLDING B.V.
- Eric James Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR FORMING WORK FUNCTION MODULATING LAYERS
- Publication number 20230178375
- Publication date Jun 8, 2023
- Applied Materials, Inc.
- Kunal Bhatnagar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BOTTOM FED SUBLIMATION BED FOR HIGH SATURATION EFFICIENCY IN SEMICO...
- Publication number 20230160064
- Publication date May 25, 2023
- Applied Materials, Inc.
- David Marquardt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AMPOULE FOR A SEMICONDUCTOR MANUFACTURING PRECURSOR
- Publication number 20230126780
- Publication date Apr 27, 2023
- Applied Materials, Inc.
- Carl White
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Bottom Fed Sublimation Bed for High Saturation Efficiency in Semico...
- Publication number 20230002893
- Publication date Jan 5, 2023
- Applied Materials, Inc.
- David Marquardt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Bottom Fed Sublimation Bed for High Saturation Efficiency in Semico...
- Publication number 20220403512
- Publication date Dec 22, 2022
- Applied Materials, Inc.
- Carl White
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods of Lowering Deposition Rate
- Publication number 20220380897
- Publication date Dec 1, 2022
- Applied Materials, Inc.
- Kunal Bhatnagar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ENHANCING GAPFILL PERFORMANCE OF DRAM WORD LINE
- Publication number 20220359532
- Publication date Nov 10, 2022
- Applied Materials, Inc.
- Yong Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW TEMPERATURE DEPOSITION OF PURE MOLYBENUM FILMS
- Publication number 20220270883
- Publication date Aug 25, 2022
- Applied Materials, Inc.
- Kunal Bhatnagar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AMPOULE FOR A SEMICONDUCTOR MANUFACTURING PRECURSOR
- Publication number 20220178020
- Publication date Jun 9, 2022
- Applied Materials, Inc.
- Carl White
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REFILLABLE LARGE VOLUME SOLID PRECURSOR SUBLIMATION VESSEL
- Publication number 20220145456
- Publication date May 12, 2022
- Carl Louis WHITE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
QUARTZ CRYSTAL MICROBALANCE CONCENTRATION MONITOR
- Publication number 20210340674
- Publication date Nov 4, 2021
- Applied Materials, Inc.
- Jereld Winkler
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REACTANT VAPORIZER AND RELATED SYSTEMS AND METHODS
- Publication number 20200340109
- Publication date Oct 29, 2020
- ASM IP HOLDING B.V.
- Mohith Verghese
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TRITERTBUTYL ALUMINUM REACTANTS FOR VAPOR DEPOSITION
- Publication number 20200123013
- Publication date Apr 23, 2020
- ASM IP HOLDING B.V.
- Eric J. Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SOLID SOURCE SUBLIMATOR
- Publication number 20200056283
- Publication date Feb 20, 2020
- ASM IP HOLDING B.V.
- Eric James Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESSING REACTOR AND COMPONENTS THEREOF
- Publication number 20200056286
- Publication date Feb 20, 2020
- ASM IP HOLDING, B.V.
- Eric James Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESSING APPARATUS AND METHODS FOR MONITORING AND C...
- Publication number 20190276934
- Publication date Sep 12, 2019
- ASM IP HOLDING B.V.
- Mohith Verghese
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-ZONE REACTOR, SYSTEM INCLUDING THE REACTOR, AND METHOD OF USI...
- Publication number 20190157054
- Publication date May 23, 2019
- ASM IP HOLDING B.V.
- Carl Louis White
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRITERTBUTYL ALUMINUM REACTANTS FOR VAPOR DEPOSITION
- Publication number 20180339907
- Publication date Nov 29, 2018
- ASM IP HOLDING B.V.
- Eric J. Shero
- C01 - INORGANIC CHEMISTRY
Information Patent Application
REACTANT VAPORIZER AND RELATED SYSTEMS AND METHODS
- Publication number 20180094350
- Publication date Apr 5, 2018
- ASM IP HOLDING B.V.
- Mohith Verghese
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REACTANT VAPORIZER AND RELATED SYSTEMS AND METHODS
- Publication number 20180094351
- Publication date Apr 5, 2018
- ASM IP HOLDING B.V.
- Mohith Verghese
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TRITERTBUTYL ALUMINUM REACTANTS FOR VAPOR DEPOSITION
- Publication number 20170096345
- Publication date Apr 6, 2017
- ASM IP HOLDING B.V.
- Eric J. Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE ETCHING OF REACTOR SURFACES
- Publication number 20170009136
- Publication date Jan 12, 2017
- ASM AMERICA, INC
- Srini Raghavan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Mohith E. Verghese

Person

Patents Grantslast 30 patents

Enhancing gapfill performance of dram word line

Low temperature deposition of pure molybdenum films

Bottom fed sublimation bed for high saturation efficiency in semico...

Reactant vaporizer and related systems and methods

Ampoule for a semiconductor manufacturing precursor

Low temperature deposition of pure molybenum films

Solid source sublimator

Bottom fed sublimation bed for high saturation efficiency in semico...

Multi-zone reactor, system including the reactor, and method of usi...

Solid source sublimator

Semiconductor processing apparatus comprising one or more pyrometer...

Bottom fed sublimation bed for high saturation efficiency in semico...

Ampoule for a semiconductor manufacturing precursor

Reactant vaporizer and related systems and methods

Quartz crystal microbalance concentration monitor

Reactant vaporizer and related systems and methods

Tritertbutyl aluminum reactants for vapor deposition

Semiconductor processing reactor and components thereof

Systems and methods for thin-film deposition of metal oxides using...

Tritertbutyl aluminum reactants for vapor deposition

Cross-flow reactor and method

Semiconductor processing reactor and components thereof

Reaction system for growing a thin film

Selective etching of reactor surfaces

Multi-zone reactor, system including the reactor, and method of usi...

Tritertbutyl aluminum reactants for vapor deposition

Methods of vapor deposition with multiple vapor sources

Precursor delivery system

Selective etching of reactor surfaces

Semiconductor processing reactor and components thereof

Patents Applicationslast 30 patents

REACTANT VAPORIZER AND RELATED SYSTEMS AND METHODS

CONFORMAL MOLYBDENUM DEPOSITION

LOW TEMPERATURE DEPOSITION OF PURE MOLYBENUM FILMS

METHODS OF SELECTIVE DEPOSITION OF MOLYBDENUM

SOLID SOURCE SUBLIMATOR

SOLID SOURCE SUBLIMATOR

SEMICONDUCTOR PROCESSING APPARATUS AND METHODS FOR MONITORING AND C...

SOLID SOURCE SUBLIMATOR

METHODS FOR FORMING WORK FUNCTION MODULATING LAYERS

BOTTOM FED SUBLIMATION BED FOR HIGH SATURATION EFFICIENCY IN SEMICO...

AMPOULE FOR A SEMICONDUCTOR MANUFACTURING PRECURSOR

Bottom Fed Sublimation Bed for High Saturation Efficiency in Semico...

Bottom Fed Sublimation Bed for High Saturation Efficiency in Semico...

Methods of Lowering Deposition Rate

ENHANCING GAPFILL PERFORMANCE OF DRAM WORD LINE

LOW TEMPERATURE DEPOSITION OF PURE MOLYBENUM FILMS

AMPOULE FOR A SEMICONDUCTOR MANUFACTURING PRECURSOR

REFILLABLE LARGE VOLUME SOLID PRECURSOR SUBLIMATION VESSEL

QUARTZ CRYSTAL MICROBALANCE CONCENTRATION MONITOR

REACTANT VAPORIZER AND RELATED SYSTEMS AND METHODS

TRITERTBUTYL ALUMINUM REACTANTS FOR VAPOR DEPOSITION

SOLID SOURCE SUBLIMATOR

SEMICONDUCTOR PROCESSING REACTOR AND COMPONENTS THEREOF

SEMICONDUCTOR PROCESSING APPARATUS AND METHODS FOR MONITORING AND C...

MULTI-ZONE REACTOR, SYSTEM INCLUDING THE REACTOR, AND METHOD OF USI...

TRITERTBUTYL ALUMINUM REACTANTS FOR VAPOR DEPOSITION

REACTANT VAPORIZER AND RELATED SYSTEMS AND METHODS

REACTANT VAPORIZER AND RELATED SYSTEMS AND METHODS

TRITERTBUTYL ALUMINUM REACTANTS FOR VAPOR DEPOSITION

SELECTIVE ETCHING OF REACTOR SURFACES