Monique Ben-Dor

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Palo Alto, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Method of depositing a silicon containing layer on a semiconductor...
- Patent number 6,626,185
- Issue date Sep 30, 2003
- Lam Research Corporation
- Alex Demos
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Inductively coupled plasma CVD
- Patent number 6,184,158
- Issue date Feb 6, 2001
- Lam Research Corporation
- Paul Kevin Shufflebotham
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Inductively coupled plasma CVD
- Publication number 20010019903
- Publication date Sep 6, 2001
- Paul Kevin Shufflebotham
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IN-SITU CHAMBER CLEANING METHOD FOR SUBSTRATE PROCESSING CHAMBER US...
- Publication number 20010008138
- Publication date Jul 19, 2001
- ALEX DEMOS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...